ALIGNMENT METHODS IN FLUID-FILLED MEMS DISPLAYS

• US 20130010341A1
• Filed: 08/30/2012
• Published: 01/10/2013
• Est. Priority Date: 02/23/2005
• Status: Active Grant

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Pixtronix, Incorporated (Qualcomm, Inc.)
• Inventors: Hagood, Nesbitt W., Fijol, John J., Steyn, Jasper Lodewyk, Payne, Richard S., Gandhi, Jignesh
• Granted Patent: US 9,274,333 B2
• Time in Patent Office: Days
• US Class Current: 359/230
• CPC Class Codes: B81B 2201/047 Optical MEMS not provided for in B81B2201/042 - B81B2201/045
• CPC Class Codes: B81B 2203/0315 Cavities
• CPC Class Codes: B81C 2203/0118 Bonding a wafer on the substrate, i.e. where the cap consists of another wafer
• CPC Class Codes: B81C 2203/019 characterised by the material or arrangement of seals between parts
• CPC Class Codes: B81C 2203/051 Active alignment, e.g. using internal or external actuators, magnets, sensors, marks or marks detectors
• CPC Class Codes: B81C 3/004 Active alignment, i.e. moving the elements in response to the detected position of the elements using internal or external actuators
• CPC Class Codes: G02B 26/00 Optical devices or arrangements for the control of light using movable or deformable optical elements control of light by modification of the optical properties of the media of the elements involved therein G02F1/00
• CPC Class Codes: G02B 26/023 comprising movable attenuating elements, e.g. neutral density filters
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G09G 2300/023 Display panel composed of stacked panels
• CPC Class Codes: G09G 2300/0426 Layout of electrodes and connections
• CPC Class Codes: G09G 2300/0443 with several sub-pixels for the same colour in a pixel, not specifically used to display gradations G09G3/364 takes precedence
• CPC Class Codes: G09G 2300/0842 forming a memory circuit, e.g. a dynamic memory with one capacitor
• CPC Class Codes: G09G 3/3433 using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices using liquid crystal devices G09G3/36; using electrochromic devices G09G3/38
• CPC Class Codes: G09G 3/3473 based on light coupled out of a light guide, e.g. due to scattering, by contracting the light guide with external means
• CPC Class Codes: H01L 2924/1461 MEMS

Abstract

This application relates to a display including a first layer of material including a first aperture having at least one side, a first substrate separated from the first layer of material by a gap, where the first substrate is arranged to pass through a portion of light emitted from a light source into the gap. The display further includes a movable shutter arranged within the gap, where the shutter is movable to at least a first position and a second position, to obstruct passage of the portion of light through the first aperture at the first position. The movable shutter has a first edge, and in the first position, the movable shutter is aligned with the first aperture such that the first edge extends a first length past the at least one side of the first aperture.

Claims

1. A display comprising:

a first layer of material including a first aperture having at least one side;

a first substrate being separated from the first layer of material by a gap, the first substrate arranged to pass through a portion of light emitted from a light source into the gap; and

a movable shutter arranged within the gap, the shutter movable to at least a first position and a second position, to obstruct passage of the portion of light through the first aperture at the first position, the movable shutter having a first edge, and in the first position, the movable shutter being aligned with the first aperture such that the first edge extends a first length past the at least one side of the first aperture.

2. The display of claim 1, further comprising a second layer of material arranged over a surface of the first substrate, the second layer of material having a second aperture with at least one side, the movable shutter being aligned with the second aperture.

3. The display of claim 2, wherein the first edge of the movable shutter in the first position extends a second length past the at least one side of the second aperture.

4. The display of claim 3, wherein the first length is substantial the same as the second length.

5. The display of claim 2, wherein the portion of light passes through the second aperture and into the gap.

6. The display of claim 1, wherein the first substrate is substantially transparent.

7. The display of claim 1, wherein the first length is more than 0 microns and less than about 5 microns.

8. The display of claim 1, wherein the first length is more than 0 microns and less than about 20 microns.

9. The display of claim 1, wherein a side of the shutter facing away from the first aperture includes at least one of a reflective material and a light-absorbing material.

10. The display of claim 1, wherein a side of the shutter facing toward the first aperture includes a light-absorbing material.

11. The display of claim 2, wherein the second layer of material includes at least one of a mirror, a dielectric mirror, a metallic film, a metal, and a reflective material.

12. The display of claim 2, wherein a side of the second layer of material facing toward the gap includes a light-absorbing material.

13. The display of claim 2, wherein a side of the second layer of material facing away from the gap includes a reflective material.

14. The display of claim 2, wherein the second layer of material includes both a reflective layer and a light-absorbing layer.

15. The display of claim 1, wherein a side of the first layer of material facing toward the gap includes a light-absorbing material.

16. The display of claim 1, further comprising a second substrate, the first layer of material being arranged over a surface of the second substrate.

17. The display of claim 1, further comprising an actuator for moving the shutter between the closed position and an open position, a portion of the actuator being arranged adjacent to the first layer of material.

18. The display of claim 1, further comprising an actuator for moving the shutter between the first position and the second position, a portion of the actuator being arranged adjacent to the second layer of material.

19. A method of manufacturing a display comprising:

providing a first layer of material including a first aperture having at least one side;

providing a first substrate;

separating the first substrate from the first layer of material by a gap, the first substrate being arranged to pass through a portion of light emitted from a light source into the gap;

providing a movable shutter for obstructing the passage of light through the first aperture, the movable shutter having a first edge; and

aligning the movable shutter with the first aperture such that, in a first position, the first edge extends a first length past the at least one side of the first aperture.

20. The method of claim 19, further comprising:

applying a second layer of material arranged over a surface of the first substrate, the second layer of material having a second aperture with at least one side; and

aligning the movable shutter with the second aperture.