PACKAGED DEVICE AND METHOD OF FABRICATING PACKAGED-DEVICE
1 Assignment
0 Petitions
Accused Products
Abstract
A method includes forming grooves in first regions included in a first wafer to form wiring regions defined by the grooves; forming insulating portions in the grooves; joining a surface of the first wafer on which the wiring regions are formed to a first surface of a device wafer including device forming regions after forming the insulating portions; forming through holes in the wiring regions of the first wafer after joining the first wafer to the device wafer, the holes extending through the first wafer; filling the holes with a conductive material; joining a second wafer to a second surface of the device wafer opposite the first surface, the second wafer including second regions; exposing the wiring regions by thinning the first wafer after joining the first wafer to the device wafer; and cutting the device wafer, the first wafer, and the second wafer after thinning the first wafer.
5 Citations
16 Claims
-
1-9. -9. (canceled)
-
10. A packaged device comprising:
-
a device layer section in which a movable microdevice including a movable part and a terminal part is formed; a first packaging member joined to the device layer section, and including a wiring region provided at a position corresponding to the terminal part and a conductive plug extending through the wiring region; and a second packaging member joined to a side of the device layer section opposite the first packaging member. - View Dependent Claims (11, 12, 13, 14, 15, 16)
-
Specification