MICROSENSOR WITH INTEGRATED TEMPERATURE CONTROL
First Claim
1. A semiconductor device for detecting an analyte in a sample, the semiconductor device including a sensor comprising:
- a sensing region formed over a semiconductor substrate, the sensing region including a transducer configured to detect an interaction between the sensing region and the analyte;
an integrated thermal energy source underlying the sensing region, the thermal energy source configured to produce thermal energy; and
an integrated temperature sensor adjacent the sensing region, the integrated temperature sensor configured to sense temperature of the sensing region.
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Accused Products
Abstract
Microsensors that include an integrated thermal energy source and an integrated temperature sensor are capable of providing localized heating and temperature control of individual sensing regions within the microsensor. Localized temperature control allows analyte detection to be carried out at the same temperatures or substantially the same temperatures at which the sensor is calibrated. By carrying out the sensing near the calibration temperature, more accurate results can be obtained. In addition, the temperature of the sensing region can be controlled so that chemical reactions involving the analyte in the sensing region occur near their peak reaction rate. Carrying out the sensing near the peak reaction rate improves the sensitivity of the sensor which is important as sensor dimensions decrease and the magnitude of the generated signals decreases.
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Citations
20 Claims
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1. A semiconductor device for detecting an analyte in a sample, the semiconductor device including a sensor comprising:
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a sensing region formed over a semiconductor substrate, the sensing region including a transducer configured to detect an interaction between the sensing region and the analyte; an integrated thermal energy source underlying the sensing region, the thermal energy source configured to produce thermal energy; and an integrated temperature sensor adjacent the sensing region, the integrated temperature sensor configured to sense temperature of the sensing region. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A system for detecting an analyte in a sample, the system comprising:
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a semiconductor device component including a sensor for detecting the analyte in the sample, the sensor including; a sensing region formed over a semiconductor substrate, the sensing region including a transducer configured to detect an interaction between the analyte and the sensing region; an integrated thermal energy source underlying the sensing region, the thermal energy source configured to produce thermal energy; and an integrated temperature sensor adjacent the sensing region, the integrated temperature sensor configured to sense temperature of the sensing region; and a control component configured to receive a signal from the integrated temperature sensor and provide a signal to the thermal energy source in response to the signal received from the integrated temperature sensor.
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9. A method for forming a semiconductor device used for detecting an analyte in a sample, the method comprising:
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forming a thermal insulation layer over a silicon substrate; forming a thermal energy source layer over the thermal insulation layer, the thermal energy source layer being a refractory material; patterning the thermal energy source layer to form a thermal energy source; forming a thermal conducting layer over the thermal energy source; forming a temperature sensor over the thermal conducting layer; forming a working electrode and a counter electrode over the thermal conducting layer; forming a passivation layer over the temperature sensor; and patterning the passivation layer to expose at least a portion of the working electrode and counter electrode. - View Dependent Claims (10, 11, 12)
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13. A semiconductor device for detecting an analyte in a sample, the semiconductor device including a sensor comprising:
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a sensing region formed over a semiconductor substrate, the sensing region including a transducer configured to detect an interaction between the sensing region and the analyte; an integrated thermal energy source adjacent the sensing region, the integrated thermal energy source configured to produce thermal energy and provide localized heating to the sensing region; and an integrated temperature sensor adjacent the sensing region, the integrated temperature sensor configured to sense temperature of the sensing region. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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Specification