TEMPERATURE MEASURING PROBE, TEMPERATURE MEASURING APPARATUS, AND TEMPERATURE MEASURING METHOD

• US 20130010829A1
• Filed: 05/13/2011
• Published: 01/10/2013
• Est. Priority Date: 05/19/2010
• Status: Abandoned Application

• Current Assignee: Canon Ayutthaya Limited (Canon Inc.)
• Original Assignee: Canon Ayutthaya Limited (Canon Inc.)
• Inventors: Ojima, Kaoru
• Application Number:
  US13/634,690
• Publication Number:
  US 20130010829A1
• Time in Patent Office: Days
• US Class Current: 374/208
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01K 5/486 using microstructures, e.g. made of silicon G01K7/015, G01K7/028, G01K7/226, G01K17/006 take precedence
• CPC Class Codes: G01K 5/64 Details of the compounds system
• CPC Class Codes: G01K 5/68 Shape of the system
• CPC Class Codes: G01Q 60/58 SThM [Scanning Thermal Microscopy] or apparatus therefor, e.g. SThM probes

Abstract

A temperature measuring probe is characterized in that it has a film 4 on a part of a first surface of a cantilever 2 having an opening in the center, the film 4 is formed of a material different in coefficient of thermal expansion from the cantilever 2, it has a film 5 on a part of a surface of the cantilever 2 opposite to the first surface, the film 5 is formed of the same material as the film 4, and when the films 4 and 5 are projected onto a plane parallel to the cantilever 2, the projection image of the film 4 and the projection image of the film 5 do not coincide. Thus, a temperature measuring probe and a temperature measuring apparatus can be made that can be used with a general-purpose scanning probe microscope and is insusceptible to thermal deformation of a sample.

Claims

1. A temperature measuring probe comprising:

a support member;

a cantilever one end of which is supported by the support member and that has a closed ring structure; and

a probe tip disposed at a tip of the cantilever,

wherein the cantilever has such a closed ring structure that two components extending from the support member to the probe tip unite at the tip of the cantilever, and films of a material different in coefficient of thermal expansion from the components of the cantilever are formed on a surface of one of the two components of the cantilever and on a surface of the other component on the opposite side from the surface.

2. A temperature measuring apparatus comprising:

the temperature measuring probe according to claim 1;

a probe holder to which the temperature measuring probe is fixed;

a sample stage on which a sample to be measured is placed;

a drive stage that changes the relative positions of the temperature measuring probe and the sample stage; and

a detector configured to detect the displacement of the cantilever.

3. A temperature measuring method comprising the steps of:

pressing the probe tip of the temperature measuring probe according to claim 1 against a sample at a constant pressure;

optically detecting the twist of the cantilever; and

measuring the temperature of the sample from the detected amount and a preliminarily-stored temperature value corresponding to the amount of twist of the cantilever.