EVAPORATION MASK, METHOD OF MANUFACTURING EVAPORATION MASK, ELECTRONIC DEVICE, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE
First Claim
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1. An evaporation mask comprising:
- a substrate including one or a plurality of first opening sections; and
a polymer film provided on a first main surface side of the substrate, the polymer film including one or a plurality of second opening sections communicated with the respective first opening sections.
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Abstract
There are provided an evaporation mask with which an evaporated film is allowed to be formed with a fine pattern, a method of manufacturing the same, and a method of manufacturing an electronic device using such an evaporation mask. Further, there is provided an electronic device having a film-formation pattern that is precisely formed with a fine pattern. The evaporation mask including: a substrate including one or a plurality of first opening sections; and a polymer film provided on a first main surface side of the substrate, the polymer film including one or a plurality of second opening sections communicated with the respective first opening sections.
36 Citations
20 Claims
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1. An evaporation mask comprising:
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a substrate including one or a plurality of first opening sections; and a polymer film provided on a first main surface side of the substrate, the polymer film including one or a plurality of second opening sections communicated with the respective first opening sections. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. An electronic device comprising:
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a conductive film in a selective region on a substrate, wherein in the conductive film, a foot section thereof is tilted with a slope being more moderate as its position is closer to the substrate side. - View Dependent Claims (13, 14, 15, 16)
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17. A method of manufacturing an evaporation mask, comprising:
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forming one or a plurality of first opening sections in a substrate; and forming a polymer film including one or a plurality of second opening sections on a first main surface side of the substrate, the one or the plurality of second opening sections being communicated with the one or the plurality of first opening sections. - View Dependent Claims (18, 19)
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20. A method of manufacturing an electronic device, the method comprising
forming a conductive film by using an evaporation mask, wherein the evaporation mask includes a substrate and a polymer film, the substrate including one or a plurality of first opening sections, and the polymer film being provided on a first main surface side of the substrate and including one or a plurality of second opening sections communicated with the respective first opening sections.
Specification