SOLENOID INDUCTOR FOR FREQUENCY SYNTHESIZER IN DIGITAL CMOS PROCESS
First Claim
1. A solenoid inductor for a frequency synthesizer in a digital CMOS process, comprising:
- a plurality of wiring metals configured in a solenoid structure with a given width wherein the wiring metals are stacked at two side regions in a direction perpendicular to a substrate; and
wiring metal connection means connecting the stacked side regions of the individual wiring metals in a vertical direction,wherein a given number of lower layer wiring metals among the wiring metals are connected through corresponding wiring metal connection means so as to completely overlap.
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Accused Products
Abstract
The present invention relates to a solenoid inductor for a frequency synthesizer in a digital CMOS process. The solenoid inductor includes: a plurality of wiring metals configured in a solenoid structure with a given width wherein the wiring metals are stacked at two side regions in a vertical direction; and wiring metal connection means connecting the stacked side regions of the individual wiring metals in a vertical direction, wherein a given number of lower layer wiring metals among the wiring metals are connected through corresponding wiring metal connection means so as to completely overlap. Hence, by using a solenoid inductor to implement a frequency synthesizer operating at high frequency bands of 4 to 5 GHz or higher in a digital CMOS process, a frequency synthesizer operating at several GHz frequencies, which has been realized only in an RF CMOS process, can be implemented.
10 Citations
6 Claims
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1. A solenoid inductor for a frequency synthesizer in a digital CMOS process, comprising:
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a plurality of wiring metals configured in a solenoid structure with a given width wherein the wiring metals are stacked at two side regions in a direction perpendicular to a substrate; and wiring metal connection means connecting the stacked side regions of the individual wiring metals in a vertical direction, wherein a given number of lower layer wiring metals among the wiring metals are connected through corresponding wiring metal connection means so as to completely overlap. - View Dependent Claims (2, 3, 4, 5)
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6. A solenoid inductor for a frequency synthesizer in a digital CMOS process, comprising:
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a plurality of wiring metals configured in a solenoid structure with a given width, wherein the wiring metals are stacked at two side regions in a direction perpendicular to a substrate; and wiring metal connection means connecting the stacked side regions of the individual wiring metals in a vertical direction, wherein the wiring metals include fourth and subsequent wiring metals and a top wiring metal that are configured in a solenoid structure with a coil wound in a direction parallel to the substrate, magnetic flux of the solenoid inductor is directed in a direction horizontal to the substrate, and first to third wiring metals stacked to form the frequency synthesizer are placed under the fourth wiring metal of the solenoid inductor.
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Specification