PIEZOELECTRIC LATERALLY VIBRATING RESONATOR STRUCTURE GEOMETRIES FOR SPURIOUS FREQUENCY SUPPRESSION
First Claim
1. A resonator structure comprising:
- a first conductive layer of electrodes disposed along an X axis;
a second conductive layer of electrodes disposed along the X axis and offset from the first conductive layer along a Z axis perpendicular to the X axis; and
a piezoelectric layer including a piezoelectric material, the piezoelectric layer disposed between the first conductive layer and the second conductive layer, the piezoelectric layer having a first side and a second side opposite the first side, the first side proximate the first conductive layer, the second side proximate the second conductive layer;
one or more trenches being formed in the piezoelectric layer on the first side in one or more respective space regions between the electrodes of the first conductive layer.
2 Assignments
0 Petitions
Accused Products
Abstract
This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, a resonator structure includes a first conductive layer of electrodes and a second conductive layer of electrodes. A piezoelectric layer including a piezoelectric material is disposed between the first conductive layer and the second conductive layer. One or more trenches can be formed in the piezoelectric layer on one or both sides in space regions between the electrodes. In some implementations, a process for forming the resonator structure includes removing an exposed portion of the piezoelectric layer to define a trench, for instance, by partial etching or performing an isotropic release etch using a XeF2 gas or SF6 plasma. In some other implementations, a portion of a sacrificial layer is removed to define a trench in the piezoelectric layer.
-
Citations
35 Claims
-
1. A resonator structure comprising:
-
a first conductive layer of electrodes disposed along an X axis; a second conductive layer of electrodes disposed along the X axis and offset from the first conductive layer along a Z axis perpendicular to the X axis; and a piezoelectric layer including a piezoelectric material, the piezoelectric layer disposed between the first conductive layer and the second conductive layer, the piezoelectric layer having a first side and a second side opposite the first side, the first side proximate the first conductive layer, the second side proximate the second conductive layer; one or more trenches being formed in the piezoelectric layer on the first side in one or more respective space regions between the electrodes of the first conductive layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 15)
-
-
16. A process for forming a resonator structure comprising:
-
depositing a sacrificial layer on a substrate; forming a lower electrode layer on the sacrificial layer; depositing a piezoelectric layer on the lower electrode layer; forming an upper electrode layer on the piezoelectric layer, the upper electrode layer including a space region and an electrode region; removing an exposed portion of the piezoelectric layer in the space region to define a trench in the piezoelectric layer; and removing at least a portion of the sacrificial layer to define a cavity such that at least a portion of the lower electrode layer is spaced apart from the substrate. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
-
-
27. A process for forming a resonator structure comprising:
-
depositing a first sacrificial layer on a substrate; forming a lower electrode layer on the first sacrificial layer, the lower electrode layer including an electrode region and a space region exposing a portion of the first sacrificial layer; forming a second sacrificial layer on the space region of the lower electrode layer; depositing a piezoelectric layer on the lower electrode layer and the second sacrificial layer; forming an upper electrode layer on the piezoelectric layer; and removing at least a portion the first sacrificial layer and at least a portion of the second sacrificial layer, removal of the portion of the first sacrificial layer defining a cavity such that at least a portion of the lower electrode layer is spaced apart from the substrate, removal of the portion of the second sacrificial layer defining a trench in the piezoelectric layer. - View Dependent Claims (28, 29, 30, 31, 32)
-
-
33. A resonator structure comprising:
-
first conductive means of electrodes disposed along an X axis; second conductive means of electrodes disposed along the X axis and offset from the first conductive means along a Z axis perpendicular to the X axis; and piezoelectric means including a piezoelectric material, the piezoelectric means disposed between the first conductive means and the second conductive means, the piezoelectric means having a first side and a second side opposite the first side, the first side proximate the first conductive means, the second side proximate the second conductive means; one or more trenches being formed in the piezoelectric means on the first side in one or more respective space regions between the electrodes of the first conductive means. - View Dependent Claims (34, 35)
-
Specification