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WAVEFRONT ABERRATION MEASURING APPARATUS

  • US 20130027691A1
  • Filed: 10/05/2012
  • Published: 01/31/2013
  • Est. Priority Date: 04/05/2010
  • Status: Active Grant
First Claim
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1. A wavefront aberration measuring apparatus comprising:

  • an illumination optical system provided to an incident side of a test lens; and

    a measuring optical system provided to an exit side of the test lens,the illumination optical system including an aperture stop capable of being opened and closed, andthe illumination optical system being movable along an optical axis of the illumination optical system so as to adjust positions of the aperture stop and an entrance pupil of the test lens to have an optically conjugate relation with each other.

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