ARCHITECTURE FOR ANALYSIS AND PREDICTION OF INTEGRATED TOOL-RELATED AND MATERIAL-RELATED DATA AND METHODS THEREFOR

• US 20130030760A1
• Filed: 07/27/2011
• Published: 01/31/2013
• Est. Priority Date: 07/27/2011
• Status: Abandoned Application

• Current Assignee: Bistel America Incorporated
• Original Assignee: Bistel America Incorporated
• Inventors: Wang, Weidong, Ho, Tom Thuy, Choi, Woon-Kyu, Han, Ji-Hoon Keith, Villareal, Gabriel Serge
• Application Number:
  US13/192,387
• Publication Number:
  US 20130030760A1
• Time in Patent Office: Days
• US Class Current: 702/179
• CPC Class Codes: G05B 19/41875 characterised by quality surveillance of production
• CPC Class Codes: G05B 2219/31352 Expert system integrates knowledges to control workshop
• CPC Class Codes: G05B 2219/32179 Quality control, monitor production tool with multiple sensors
• CPC Class Codes: G05B 2219/32187 Correlation between controlling parameters for influence on quality parameters
• CPC Class Codes: G05B 2219/32194 Quality prediction
• CPC Class Codes: G05B 2219/32221 Correlation between defect and measured parameters to find origin of defect
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: G06Q 10/04 Forecasting or optimisation specially adapted for administrative or management purposes, e.g. linear programming or "cutting stock problem" market predictions or forecasting for commercial activities G06Q30/0202

Abstract

Integrated yield/equipment data processing system for collecting and analyzing integrated tool-related data (cause data) and material-related data (effect data) pertaining to at least one material processing tool and at least one material is disclosed. In an embodiment, the tool-related data is correlated with the material-related data, and the correlated tool-related data and material-related data is employed by logic to perform at least one of root-cause analysis, prediction model building and tool control/optimization. By integrating cause-and-effect data in a single platform, the data necessary for performing, for example, automated problem detection (e.g., automated root cause analysis) and prediction, is readily available and correlated, which for example shortens the cycle time to detection and facilitates efficient and timely automated tool management and control.

Claims

1. An integrated yield/equipment data processing system for collecting and analyzing integrated tool-related data and material-related data pertaining to at least one material processing tool and at least one material, comprising:

at least a first I/O module for collecting said tool-related data pertaining to said at least one material processing tool;

at least a second I/O module for collecting said material-related data pertaining to said at least one material;

first logic for correlating said tool-related data with said material-related data, thereby obtaining correlated tool-related data and material-related data; and

second logic for analyzing said correlated tool-related data and material-related data to perform at least one of root-cause analysis, prediction model building and tool control/optimization.

2. The integrated yield/equipment data processing system of claim 1 further including third logic for updating a knowledge base with at least one of said root-cause analysis and a cause-effect relationship between said tool-related data and said material-related data.

3. The integrated yield/equipment data processing system of claim 2 wherein at least one of said correlating and said analyzing also utilizes said knowledge base.

4. integrated yield/equipment data processing system of claim 2 wherein said knowledge base includes at least one of tool profiles, process profiles, and cause-effect relationships between certain previously acquired tool-related data and certain previously acquired material-related data.

5. The integrated yield/equipment data processing system of claim 1 further including at least one offline analysis module that performs at least one of data extraction, analysis, viewing and configuration on archival data, the archival data including both prior recorded tool-related data and prior-recorded material-related data.

6. The integrated yield/equipment data processing system of claim 1 wherein said second logic includes at least a data/connectivity platform and at least one analysis module, wherein said data/connectivity platform facilitates data connectivity for obtaining said tool-related data and said material-related data, said at least one analysis module performing said at least one of root-cause analysis, prediction model building and tool control/optimization utilizing said tool-related data and said material-related data.

7. The integrated yield/equipment data processing system of claim 6 wherein said at least one analysis module performs said root-cause analysis.

8. The integrated yield/equipment data processing system of claim 7 wherein said root-cause analysis is performed using a correlation result that is pre-stored in a knowledge database.

9. The integrated yield/equipment data processing system of claim 8 wherein said correlation result is obtained by prior off-line analysis on a different set of said tool-related data and said material-related data.

10. The integrated yield/equipment data processing system of claim 6 wherein said at least one analysis module represents a root cause analysis module, said root cause analysis module producing multiple probable root causes ranked by a probability ranking.

11. The integrated yield/equipment data processing system of claim 10 wherein said probability ranking is produced using at least one of expert domain knowledge and historical knowledge learning that has been pre-stored in a database.

12. The integrated yield/equipment data processing system of claim 6 wherein said at least one analysis module represents a root cause analysis module, said root cause analysis module performing at least one of clustering and classification on a set of materials to facilitate analysis using different statistical methods.

13. The integrated yield/equipment data processing system of claim 6 wherein said at least one analysis module performs said tool control/optimization.

14. The integrated yield/equipment data processing system of claim 13 wherein said tool control/optimization is performed using a correlation result that is pre-stored in a knowledge database.

15. The integrated yield/equipment data processing system of claim 14 wherein said correlation result is obtained by prior off-line analysis on a different set of said tool-related data and said material-related data.

16. The integrated yield/equipment data processing system of claim 6 wherein said at least one analysis module performs said prediction model building.

17. The integrated yield/equipment data processing system of claim 16 wherein said prediction model building is performed using a correlation result that is pre-stored in a knowledge database.

18. The integrated yield/equipment data processing system of claim 17 wherein said correlation result is obtained by prior off-line analysis on a different set of said tool-related data and said material-related data.

19. An integrated yield/equipment data processing system for collecting and analyzing integrated tool-related data and material-related data pertaining to at least one material processing tool and at least one material, comprising:

means for collecting said tool-related data pertaining to said at least one material processing tool and said material-related data pertaining to said at least one material;

means for correlating said tool-related data with said material-related data, thereby obtaining correlated tool-related data and material-related data; and

means for analyzing said correlated tool-related data and material-related data to perform at least one of root-cause analysis, prediction model building and tool control/optimization.

20. The integrated yield/equipment data processing system of claim 19 wherein said first logic correlates said tool-related data with said material-related data using at least date/time and tool ID.

21. A method for collecting and analyzing integrated tool-related data and material-related data pertaining to at least one material processing tool and at least one material, said collecting and analyzing utilizing an integrated yield/equipment data processing system, comprising:

collecting said tool-related data pertaining to said at least one material processing tool;

collecting said material-related data pertaining to said at least one material;

correlating said tool-related data with said material-related data, thereby obtaining correlated tool-related data and material-related data; and

analyzing said correlated tool-related data and material-related data to perform at least one of root-cause analysis, prediction model building and tool control/optimization.