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High Frequency Deflection Measurement of IR Absorption with a Modulated IR Source

  • US 20130036521A1
  • Filed: 09/19/2011
  • Published: 02/07/2013
  • Est. Priority Date: 05/15/2007
  • Status: Active Grant
First Claim
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1. A method of obtaining measurements of infrared absorption of sub-micron regions of a sample with a probe microscope employing a cantilever probe with a tip, the method comprising:

  • a) illuminating a region of a sample with a tunable source of infrared radiation;

    b) interacting the probe tip with a surface of the sample;

    c) adjusting repeatedly a modulation frequency of the source of infrared radiation such that the modulation frequency substantially overlaps a resonant frequency of the cantilever probe and remains substantially overlapped as the cantilever resonant frequency shifts;

    d) measuring a probe response resulting from absorption of infrared radiation by the sample;

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