BEAM SPLITTER AND METHOD FOR MANUFACTURING THE SAME
First Claim
Patent Images
1. A beam splitter comprising:
- a substrate unit including a substrate member, and a beam splitter film disposed at said substrate member and capable of beam splitting, said beam splitter film including a plurality of thin film layers arranged in a stack, each of said thin film layers being made of an inorganic material; and
first and second prisms disposed on surfaces at two opposite sides of said substrate unit, respectively.
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Accused Products
Abstract
A beam splitter includes a substrate unit, and first and second prisms disposed on surfaces at two opposite sides of the substrate unit, respectively. The substrate unit includes a substrate member, and a beam splitter film disposed at the substrate member and capable of beam splitting. The beam splitter film includes a plurality of thin film layers arranged in a stack. Each of the thin film layers is made of an inorganic material.
18 Citations
17 Claims
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1. A beam splitter comprising:
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a substrate unit including a substrate member, and a beam splitter film disposed at said substrate member and capable of beam splitting, said beam splitter film including a plurality of thin film layers arranged in a stack, each of said thin film layers being made of an inorganic material; and first and second prisms disposed on surfaces at two opposite sides of said substrate unit, respectively. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for manufacturing a beam splitter, comprising the steps of:
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(A) providing a substrate unit including a substrate member and a beam splitter film, the beam splitter film being formed by disposing a plurality of thin film layers arranged in a stack at the substrate member by means of vacuum coating, each of the thin film layers being made of an inorganic material; and (B) disposing first and second prisms on surfaces at two opposite sides of the substrate unit, respectively. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17)
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Specification