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Method for the functional checking of an inertial sensor and inertial sensor

  • US 20130042664A1
  • Filed: 08/15/2012
  • Published: 02/21/2013
  • Est. Priority Date: 08/16/2011
  • Status: Abandoned Application
First Claim
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1. A method for providing functional checking of an inertial sensor, the method comprising:

  • feeding a first test signal having a first frequency in at a feed-in electrode of the inertial sensor to excite a vibration of a vibration mass;

    recording a first response signal corresponding to the vibration mass;

    feeding a second test signal, having a second frequency that is different from the first frequency, in at the feed-in electrode;

    recording a second response signal corresponding to the vibration mass; and

    evaluating the first response signal and the second response signal.

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