Method for the functional checking of an inertial sensor and inertial sensor
First Claim
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1. A method for providing functional checking of an inertial sensor, the method comprising:
- feeding a first test signal having a first frequency in at a feed-in electrode of the inertial sensor to excite a vibration of a vibration mass;
recording a first response signal corresponding to the vibration mass;
feeding a second test signal, having a second frequency that is different from the first frequency, in at the feed-in electrode;
recording a second response signal corresponding to the vibration mass; and
evaluating the first response signal and the second response signal.
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Abstract
A method for providing functional checking of an inertial sensor, a first test signal having a first frequency being fed in at a test electrode of the inertial sensor for exciting a vibration of a vibration mass and a first response signal corresponding to the vibration mass is recorded, a second test signal having a second frequency different from the first frequency being fed in at the test electrode, a second response signal corresponding to the vibration mass being recorded, and the two response signals being evaluated. Also described is an inertial sensor.
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Citations
12 Claims
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1. A method for providing functional checking of an inertial sensor, the method comprising:
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feeding a first test signal having a first frequency in at a feed-in electrode of the inertial sensor to excite a vibration of a vibration mass; recording a first response signal corresponding to the vibration mass; feeding a second test signal, having a second frequency that is different from the first frequency, in at the feed-in electrode; recording a second response signal corresponding to the vibration mass; and evaluating the first response signal and the second response signal. - View Dependent Claims (2, 3, 4, 5, 6)
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7. An inertial sensor, comprising:
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a vibration mass; a feed-in electrode for exciting a vibration of the vibration mass for feeding in a first test signal having a first frequency and a second test signal having a second frequency that is different from the first frequency; a recording device for recording a first response signal and a second response signal, respectively, corresponding to the vibration mass; and an evaluation device for evaluating the first response signal and the second response signal. - View Dependent Claims (8, 9, 10, 11, 12)
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Specification