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PHYSICAL QUANTITY SENSOR AND ELECTRONIC APPARATUS

  • US 20130042684A1
  • Filed: 08/08/2012
  • Published: 02/21/2013
  • Est. Priority Date: 08/17/2011
  • Status: Active Grant
First Claim
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1. A physical quantity sensor comprising:

  • a base substrate provided with a first recess part; and

    a sensor part located on the first recess part and swingably supported in a depth direction of the first recess part by a support part extending in a direction of a first axis,wherein the sensor part is sectioned into a first part and a second part by the support part, includes a movable electrode part in the first part and the second part, the second part is larger in mass than the first part, and a through hole is provided at least in one of the first part and the second part, andthe base substrate includes a fixed electrode part in a position overlapping with the movable electrode part in a plan view, and a second recess part deeper than the first recess part is provided in a position overlapping with an end of the sensor part in the plan view.

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