PHYSICAL QUANTITY SENSOR AND ELECTRONIC APPARATUS

• US 20130042684A1
• Filed: 08/08/2012
• Published: 02/21/2013
• Est. Priority Date: 08/17/2011
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: YODA, Mitsuhiro
• Granted Patent: US 9,151,775 B2
• Time in Patent Office: Days
• US Class Current: 73/514.01
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0831 the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

Abstract

An acceleration sensor includes a base substrate provided with a first recess part, and a sensor part located on the first recess part and swingably supported in a depth direction of the first recess part by a support part, wherein the sensor part is sectioned into a first part and a second part by the support part, includes a movable electrode part in the first part and the second part, a through hole is provided at least at an end side in the second part larger in mass than the first part, and the base substrate includes a fixed electrode part in a position opposed to the movable electrode part in the first recessed part, and a second recess part deeper than the first recess part is provided in a position opposed to the end side of the sensor part.

Claims

1. A physical quantity sensor comprising:

a base substrate provided with a first recess part; and

a sensor part located on the first recess part and swingably supported in a depth direction of the first recess part by a support part extending in a direction of a first axis,

wherein the sensor part is sectioned into a first part and a second part by the support part, includes a movable electrode part in the first part and the second part, the second part is larger in mass than the first part, and a through hole is provided at least in one of the first part and the second part, and

the base substrate includes a fixed electrode part in a position overlapping with the movable electrode part in a plan view, and a second recess part deeper than the first recess part is provided in a position overlapping with an end of the sensor part in the plan view.

2. The physical quantity sensor according to claim 1, wherein a conducting part is provided within the second recess part, and

the conducting part is connected to the movable electrode part.

3. The physical quantity sensor according to claim 1, wherein a plurality of the through holes are provided along the direction of the first axis.

4. The physical quantity sensor according to claim 1, wherein the first recess part is provided so that an air gap between the sensor part and itself may be larger from the support part of the sensor part toward the end.

5. The physical quantity sensor according to claim 1, wherein an insulating material is used for the base substrate, and

a semiconductor material is used for the sensor part.

6. An electronic apparatus comprising the physical quantity sensor according to claim 1.