INERTIA SENSING APPARATUS
First Claim
1. An inertia sensing apparatus, comprising:
- a substrate;
a first inertia sensing element, connected to the substrate and having a containment space; and
a second inertia sensing element, connected to the substrate and disposed in the containment space of the first inertia sensing element;
wherein the first inertia sensing element and the second inertia sensing element connected to the substrate and the first inertia sensing element and the second sensing element are not connected to each other, the first inertia sensing element and the second inertia sensing element detect at least one inertia motion of the inertia sensing apparatus individually and independently.
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Abstract
The invention relates to an inertia sensing apparatus, comprising a substrate, a first and second inertia sensing elements. The first inertia sensing element is connected to a substrate and has a containment space. The second inertia sensing element is connected to the substrate and is disposed in the containment space of the first inertia sensing element, wherein the first inertia sensing element and the second sensing element are connected to the substrate, and the first inertia sensing element and the second sensing element are not connected to each other, the first inertia sensing element and the second sensing element individually and independently detect at least one inertia motion of the inertia sensing apparatus. Therefore, the invention is based on the second inertia sensing element disposed in the containment space of the first inertia sensing element and they individually and independently detect at least one inertia motion of the inertia sensing apparatus, so as to decrease an area of the inertia sensing apparatus, thus reducing the chip size and prevent the two inertia sensing elements from coupling to result in decreasing the sensing precision.
26 Citations
11 Claims
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1. An inertia sensing apparatus, comprising:
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a substrate; a first inertia sensing element, connected to the substrate and having a containment space; and a second inertia sensing element, connected to the substrate and disposed in the containment space of the first inertia sensing element; wherein the first inertia sensing element and the second inertia sensing element connected to the substrate and the first inertia sensing element and the second sensing element are not connected to each other, the first inertia sensing element and the second inertia sensing element detect at least one inertia motion of the inertia sensing apparatus individually and independently. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An inertia sensing apparatus, comprising:
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a substrate; a first inertia sensing element, connected to the substrate and having a containment space; and a second inertia sensing element, used to detect a plurality of inertia motion of the inertia sensing apparatus and the second inertia sensing element is connected to the substrate and disposed in the containment space of the first inertia sensing element; wherein the first inertia sensing element and the second inertia sensing element connected to the substrate and the first inertia sensing element and the second sensing element are not connected to each other, the first inertia sensing element and the second inertia sensing element individually and independently detect at least one inertia motion of the inertia sensing apparatus. - View Dependent Claims (9, 10, 11)
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Specification