SURFACE PROFILE MEASUREMENT APPARATUS AND ALIGNMENT METHOD THEREOF AND AN IMPROVED SUB-APERTURE MEASUREMENT DATA ACQUISITION METHOD
First Claim
1. A surface profile measurement apparatus, which measures a surface profile of an object, comprising:
- a wavefront measurement unit, which has an image sensor and emits a detecting light;
a driving unit, which has a plurality of motion stages for moving the object or the wavefront measurement unit to proceed the surface curvature fitting; and
a rotation unit, which has a rotary axis and is disposed on one of the stages of the driving unit, wherein the rotation unit holds the object, and when measuring the object, the rotation unit rotates the object and the image sensor simultaneously exposes and acquires a measurement data formed by the detecting light from the object.
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Abstract
A surface profile measurement apparatus, which measures a surface profile of an object, includes a wavefront measurement unit, a driving unit and a rotation unit. The wavefront measurement unit has an image sensor and emits a detecting light. The driving unit has a plurality of stages for moving the object or the wavefront measurement unit. The rotation unit has a rotation axis, is disposed on one of the stages of the driving unit, and holds the object. When measuring the object, the rotation unit rotates the object and the image sensor simultaneously exposes and acquires a measurement data, formed by the detecting light reflected from the object. An alignment method of the surface profile measurement apparatus and an improved sub-aperture measurement data acquisition method are also disclosed.
22 Citations
20 Claims
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1. A surface profile measurement apparatus, which measures a surface profile of an object, comprising:
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a wavefront measurement unit, which has an image sensor and emits a detecting light; a driving unit, which has a plurality of motion stages for moving the object or the wavefront measurement unit to proceed the surface curvature fitting; and a rotation unit, which has a rotary axis and is disposed on one of the stages of the driving unit, wherein the rotation unit holds the object, and when measuring the object, the rotation unit rotates the object and the image sensor simultaneously exposes and acquires a measurement data formed by the detecting light from the object. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. An alignment method of a surface profile measurement apparatus, which is implemented with a surface profile measurement apparatus for measuring a surface profile of an object, the surface profile measurement apparatus comprising a wavefront measurement unit, a driving unit, a rotation unit and an object alignment unit, the rotation unit having a rotary axis, the object having a symmetric axis, and the wavefront measurement unit having an optical axis, the alignment method comprising:
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disposing the object on the rotation unit; the wavefront measurement unit emitting a detecting light, which proceeds a surface curvature fitting on a measured area of the object surface; the rotation unit rotating the object to at least two different rotational angles and acquiring corresponding measurement data at the different rotational angles; calculating an alignment error according to the measurement data acquired at different rotational angles; and adjusting the object alignment unit according to the alignment error, whereby the rotary axis and the object axis are substantially collinear. - View Dependent Claims (10, 11, 12, 13, 14)
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15. An improved sub-aperture measurement data acquisition method, which is implemented with a surface profile measurement apparatus comprising a driving unit, a rotation unit and a wavefront measurement unit, the data acquisition method comprising:
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moving the driving unit and a measuring light emitted by the wavefront measurement unit proceeding multiple surface curvature fittings to the same measured area of an object, wherein one of the surface curvature fittings is along a first direction of the object; rotating the rotation unit and the wavefront measurement unit acquiring a plurality of first measurement data and a plurality of secondary measurement data, wherein the acquired first measurement data have an elongated axis direction corresponding to the first direction of the object; and correlating the first measurement data and the secondary measurement data with the coordinates of the object, wherein a part of the first measurement data and a part of the secondary measurement data are overlapped at the same coordinate position. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification