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RESONANT PRESSURE SENSOR AND METHOD OF MANUFACTURING THE SAME

  • US 20130047734A1
  • Filed: 08/23/2012
  • Published: 02/28/2013
  • Est. Priority Date: 08/25/2011
  • Status: Active Grant
First Claim
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1. A resonant pressure sensor including one or more resonant-type strain gauges arranged on a diaphragm, the resonant pressure sensor comprising:

  • a sensor substrate that is made of silicon and includes one surface on which one or more resonant-type strain gauge elements are arranged and the other surface which is polished to have a thickness corresponding to the diaphragm;

    a base substrate that is made of silicon and includes one surface directly bonded with the other surface of the sensor substrate;

    a concave portion that is formed in a portion of the base substrate that bonds with the sensor substrate, substantially forms the diaphragm in the sensor substrate, and includes a predetermined gap that does not restrict a movable range of the diaphragm due to foreign substances and suppresses vibration of the diaphragm excited by vibration of the resonant-type strain gauge elements;

    one or more conducting holes that conduct measuring pressure to the concave portion; and

    a fluid that propagates pressure to the concave portion through the conducting hole and suppresses vibration of the diaphragm.

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