SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
First Claim
1. A display device comprising:
- a substrate;
a scan line and a signal line formed over the substrate along two perpendicular directions;
a capacitor wiring having a light transmitting property formed over the substrate;
a protective insulating layer;
a gate electrode layer formed in a pixel region, the gate electrode layer being in electrical contact with the scan line;
a semiconductor layer overlapping with the gate electrode layer and interposed between the gate electrode layer and the protective insulating layer;
a gate insulating layer interposed between the semiconductor layer and the gate electrode layer;
a source electrode layer and a drain electrode layer in electrical contact with the semiconductor layer;
a pixel electrode having transparency and being in electrical contact with the signal line through a serial connection comprising the drain electrode layer, the semiconductor layer and the drain electrode layer; and
a capacitor formed in the pixel region, the capacitor comprising the capacitor wiring, a capacitor electrode, and a dielectric layer interposed between the capacitor wiring and the capacitor electrode.
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Accused Products
Abstract
It is an object to manufacture and provide a highly reliable display device including a thin film transistor with a high aperture ratio which has stable electric characteristics. In a manufacturing method of a semiconductor device having a thin film transistor in which a semiconductor layer including a channel formation region is formed using an oxide semiconductor film, a heat treatment for reducing moisture and the like which are impurities and for improving the purity of the oxide semiconductor film (a heat treatment for dehydration or dehydrogenation) is performed. Further, an aperture ratio is improved by forming a gate electrode layer, a source electrode layer, and a drain electrode layer using conductive films having light transmitting properties.
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Citations
20 Claims
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1. A display device comprising:
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a substrate; a scan line and a signal line formed over the substrate along two perpendicular directions; a capacitor wiring having a light transmitting property formed over the substrate; a protective insulating layer; a gate electrode layer formed in a pixel region, the gate electrode layer being in electrical contact with the scan line; a semiconductor layer overlapping with the gate electrode layer and interposed between the gate electrode layer and the protective insulating layer; a gate insulating layer interposed between the semiconductor layer and the gate electrode layer; a source electrode layer and a drain electrode layer in electrical contact with the semiconductor layer; a pixel electrode having transparency and being in electrical contact with the signal line through a serial connection comprising the drain electrode layer, the semiconductor layer and the drain electrode layer; and a capacitor formed in the pixel region, the capacitor comprising the capacitor wiring, a capacitor electrode, and a dielectric layer interposed between the capacitor wiring and the capacitor electrode. - View Dependent Claims (2, 3)
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4. A display device comprising:
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a substrate; a scan line and a signal line formed over the substrate along two perpendicular directions; a capacitor wiring having a light transmitting property formed over the substrate; a gate electrode layer formed in a pixel region, the gate electrode layer being in electrical contact with the scan line; a semiconductor layer over the gate electrode layer; a gate insulating layer interposed between the gate electrode layer and the semiconductor layer; a source electrode layer and a drain electrode layer in electrical contact with the semiconductor layer; a pixel electrode having transparency and being in electrical contact with the signal line through a serial connection comprising the drain electrode layer, the semiconductor layer and the drain electrode layer; a protective insulating layer over the semiconductor layer; and a capacitor formed in the pixel region, the capacitor comprising the capacitor wiring, a capacitor electrode, and the gate insulating layer interposed between the capacitor wiring and the capacitor electrode. - View Dependent Claims (5, 6, 7, 8, 9, 10, 11, 12)
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13. A display device comprising:
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a substrate; a scan line and a signal line formed over the substrate along two perpendicular directions; a capacitor wiring having a light transmitting property formed over the substrate; a gate electrode layer formed in a pixel region, the gate electrode layer being in electrical contact with the scan line; a semiconductor layer over the gate electrode layer; a gate insulating layer interposed between the gate electrode layer and the semiconductor layer; a source electrode layer and a drain electrode layer in electrical contact with the semiconductor layer; a pixel electrode having transparency and being in electrical contact with the signal line through a serial connection comprising the drain electrode layer, the semiconductor layer and the drain electrode layer; a protective insulating layer over the semiconductor layer; and a capacitor formed in the pixel region, the capacitor comprising the capacitor wiring, a capacitor electrode, and the protective insulating layer interposed between the capacitor wiring and the capacitor electrode. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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Specification