GAP DISTRIBUTED BRAGG REFLECTORS
First Claim
Patent Images
1. A method of making a device, comprising:
- epitaxially growing a layer stack including one or more reflective layers and one or more interstitial layers, each interstitial layer disposed between two reflective layers; and
forming vias that intersect at least some of the layers;
exposing the interstitial layers to an etchant through the vias; and
etching the interstitial layers.
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Abstract
A device includes one or more reflector components. Each reflector component comprises layer pairs of epitaxially grown reflective layers and layers of a non-epitaxial material, such as air. Vias extend through at least some of the layers of the reflector components. The device may include a light emitting layer.
22 Citations
22 Claims
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1. A method of making a device, comprising:
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epitaxially growing a layer stack including one or more reflective layers and one or more interstitial layers, each interstitial layer disposed between two reflective layers; and forming vias that intersect at least some of the layers; exposing the interstitial layers to an etchant through the vias; and etching the interstitial layers. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A device comprising:
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one or more reflector components, each reflector component comprising alternating epitaxially grown reflective layers and layers of a non-epitaxially grown material; and one or more vias that extend through at least some of the layers of the non-epitaxially grown material. - View Dependent Claims (13, 14, 15, 16, 17)
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18. A device comprising:
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one or more reflector components, each reflector component comprising pairs of alternating layers of an epitaxially grown nitride system material and interstitial gaps between the reflective layers, wherein the reflector components include fewer than about 20 pairs and have a reflectivity greater than about 99%; and one or more vias that extend through at least some of the layers. - View Dependent Claims (19, 20)
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21. A method, comprising:
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exposing a device to an analyte, the device including a distributed Bragg reflector (DBR) comprising; a plurality of reflective layers; one or more interstitial gaps between the reflective layers; and at least one opening configured to allow entry of an analyte into the interstitial gaps; detecting one or more of a presence and a characteristic of the analyte based on one or more optical properties of the DBR.
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22. A sensor, comprising:
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a plurality of reflective layers; one or more interstitial gaps between the reflective layers; and at least one opening configured to allow entry of an analyte into the interstitial gaps, wherein the plurality of reflective layers and the interstitial gaps form a distributed Bragg reflector (DBR).
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Specification