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DRYING METHOD AND DRYING APPARATUS

  • US 20130055585A1
  • Filed: 05/16/2011
  • Published: 03/07/2013
  • Est. Priority Date: 05/17/2010
  • Status: Active Grant
First Claim
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1. A drying method comprising:

  • a step of heating an object to be dried provided in a drying chamber to a predetermined temperature;

    a step of maintaining the predetermined temperature;

    a step of increasing an air pressure inside the drying chamber to a predetermined air pressure that is higher than an atmospheric pressure while the object to be dried is at the predetermined temperature; and

    a step of decreasing the air pressure inside the drying chamber to be lower than the predetermined air pressure.

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