DRYING METHOD AND DRYING APPARATUS
First Claim
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1. A drying method comprising:
- a step of heating an object to be dried provided in a drying chamber to a predetermined temperature;
a step of maintaining the predetermined temperature;
a step of increasing an air pressure inside the drying chamber to a predetermined air pressure that is higher than an atmospheric pressure while the object to be dried is at the predetermined temperature; and
a step of decreasing the air pressure inside the drying chamber to be lower than the predetermined air pressure.
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Abstract
A drying method includes a step of heating an object to be dried provided in a drying chamber to a predetermined temperature, a step of maintaining the predetermined temperature, a step of increasing an air pressure inside the drying chamber to a predetermined air pressure that is higher than an atmospheric pressure, and a step of decreasing the air pressure inside the drying chamber to be lower than the predetermined air pressure.
10 Citations
6 Claims
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1. A drying method comprising:
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a step of heating an object to be dried provided in a drying chamber to a predetermined temperature; a step of maintaining the predetermined temperature; a step of increasing an air pressure inside the drying chamber to a predetermined air pressure that is higher than an atmospheric pressure while the object to be dried is at the predetermined temperature; and a step of decreasing the air pressure inside the drying chamber to be lower than the predetermined air pressure. - View Dependent Claims (2, 3)
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4. A drying apparatus comprising:
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a drying chamber in which an object to be dried is provided; a temperature regulating mechanism provided in the drying chamber to heat the object to be dried to a predetermined temperature and thereafter maintain the predetermined temperature; and an air pressure regulating mechanism to increase an air pressure inside the drying chamber to a predetermined air pressure that is higher than an atmospheric pressure and then decrease the air pressure, while the object to be dried is at the predetermined temperature. - View Dependent Claims (5, 6)
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Specification