NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME
First Claim
1. A nonvolatile semiconductor memory device, comprising:
- a substrate;
a memory unit provided on the substrate; and
a non-memory unit provided on the substrate to be juxtaposed with the memory unit in a plane parallel to a major surface of the substrate,the memory unit including;
a first stacked body including a plurality of first electrode films and a first inter-electrode insulating film, the plurality of first electrode films being stacked along a first axis perpendicular to the major surface, the first inter-electrode insulating film being provided between two of the first electrode films mutually adjacent along the first axis;
a first semiconductor layer opposing side surfaces of the plurality of first electrode films;
a first memory film provided between the first semiconductor layer and the plurality of first electrode films; and
a first conductive film provided on the first stacked body apart from the first stacked body,the non-memory unit including a resistance element unit of the same layer as the first conductive film.
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Accused Products
Abstract
According to one embodiment, a nonvolatile semiconductor memory device includes: a substrate; a memory unit provided on the substrate; and a non-memory unit provided on the substrate. The memory unit includes: a first stacked body including a plurality of first electrode films and a first inter-electrode insulating film, the plurality of first electrode films being stacked along a first axis perpendicular to the major surface, the first inter-electrode insulating film being provided between two of the first electrode films mutually adjacent along the first axis; a first semiconductor layer opposing side surfaces of the first electrode films; a first memory film provided between the first semiconductor layer and the first electrode films; and a first conductive film provided on the first stacked body apart from the first stacked body. The non-memory unit includes a resistance element unit of the same layer as the conductive film.
28 Citations
17 Claims
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1. A nonvolatile semiconductor memory device, comprising:
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a substrate; a memory unit provided on the substrate; and a non-memory unit provided on the substrate to be juxtaposed with the memory unit in a plane parallel to a major surface of the substrate, the memory unit including; a first stacked body including a plurality of first electrode films and a first inter-electrode insulating film, the plurality of first electrode films being stacked along a first axis perpendicular to the major surface, the first inter-electrode insulating film being provided between two of the first electrode films mutually adjacent along the first axis; a first semiconductor layer opposing side surfaces of the plurality of first electrode films; a first memory film provided between the first semiconductor layer and the plurality of first electrode films; and a first conductive film provided on the first stacked body apart from the first stacked body, the non-memory unit including a resistance element unit of the same layer as the first conductive film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method for manufacturing a nonvolatile semiconductor memory device, the device including a substrate, a memory unit provided on a major surface of the substrate, and a non-memory unit juxtaposed with the memory unit in a plane parallel to the major surface, the memory unit including a first stacked body, a first semiconductor layer, a first memory film, and a first conductive film, the first stacked body including a plurality of first electrode films and a first inter-electrode insulating film, the plurality of first electrode films being stacked along a first axis perpendicular to the major surface, the first inter-electrode insulating film being provided between two of the first electrode films mutually adjacent along the first axis, the first semiconductor layer being provided to oppose side surfaces of the plurality of first electrode films, the first memory film being provided between the first semiconductor layer and the plurality of first electrode films, the first conductive film being provided on the first stacked body apart from the first stacked body, the non-memory unit including a resistance element unit of the same layer as the first conductive film, the method comprising:
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forming a conductive film stacked body on the major surface, the conductive film stacked body including a plurality of conductive material films stacked along the first axis and an inter-layer insulating film provided between two of the conductive material films mutually adjacent along the first axis; exposing side surfaces of the plurality of conductive material films in a first region of the conductive film stacked body used to form the memory unit; forming the first semiconductor layer in the first region to oppose the side surfaces of the plurality of conductive material films and forming the first memory film in the first region to be provided between the first semiconductor layer and the side surfaces; and forming the resistance element unit in a second region of the conductive film stacked body used to form the non-memory unit in a portion of the conductive material film of the uppermost layer of the plurality of conductive material films. - View Dependent Claims (15, 16, 17)
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Specification