METHOD FOR CLEANING WAFER AFTER CHEMICAL MECHANICAL PLANARIZATION

• US 20130061884A1
• Filed: 03/23/2012
• Published: 03/14/2013
• Est. Priority Date: 06/03/2011
• Status: Abandoned Application

• Current Assignee: Institute of Microelectronics Chinese Academy of Sciences (Chinese Academy of Sciences)
• Original Assignee: Institute of Microelectronics Chinese Academy of Sciences (Chinese Academy of Sciences)
• Inventors: Yang, Tao, Zhao, Chao, Li, Junfeng
• Application Number:
  US13/641,874
• Publication Number:
  US 20130061884A1
• Time in Patent Office: Days
• US Class Current: 134/26
• CPC Class Codes: H01L 21/67051 using mainly spraying means, e.g. nozzles

Abstract

A method for cleaning wafer after chemical mechanical planarization that includes placing the wafer in the wafer holder and rotating the wafer holder and the wafer simultaneously, cleaning with chemicals by providing the wafer surface with chemical detergent through the detergent supply cantilever that keeps a certain distance away from the wafer surface, cleaning with deionized water by providing the wafer surface with deionized water through the detergent supply cantilever to remove the chemical detergent and cleaning products. The method also includes the second clean for better cleaning effect and drying the wafer out. According to the wafer cleaning method, the non-contact detergent and deionized water supply cantilever used for wafer cleaning reduces or eliminates the possible problems in making macro scratches on wafer surface in the scrubbing process and increases the yield for wafer devices.

Claims

1. A method for cleaning wafer after chemical mechanical planarization, comprising:

Step A, placing the wafer in the wafer holder;

Step B, driving the wafer rotation part to rotate the wafer holder and the wafer simultaneously;

Step C, first cleaning with chemicals by providing the wafer surface with chemical detergent through the detergent supply cantilever, which keeps a certain distance away from the wafer surface;

Step D, first cleaning with deionized water by providing the wafer surface with deionized water through the detergent supply cantilever to remove the chemical detergent and cleaning products;

Step E, second cleaning for better cleaning effect; and

Step F, drying the wafer out.

2. The method according to claim 1, wherein in step A the wafer is fixed in the wafer holder by a mechanical clamp and/or by a Bernoulli cushion clamp.

3. The method according to claim 1, wherein in steps C and/or D pressurized gas or acoustic wave is imposed in chemical detergent or deionized water for better cleaning effect.

4. The method according to claim 3, wherein the pressurized gas is air or nitrogen and the spray speed of chemical detergent is 1˜

8 m/s.

5. The method according to claim 3, wherein the acoustic wave is megasonic wave.

6. The method according to claim 1, wherein step C also includes providing the back of the wafer with chemical detergent or deionized water through the internal pipelines in the wafer rotation part.

7. The method according to claim 1, wherein the chemical detergent comprises ammonia water, organic citric acid, hydrogen peroxide, hydrochloric acid, Carols acid, hydrofluoric acid, nitric acid, choline, trimethyl (2-hydroxy-methyl) ammonium hydroxide, Ozone water, sulfuric acid or combinations thereof.

8. The method according to claim 1, wherein in the second clean a similar wafer cleaning method as in step C with non-contact of the rolling brushes is used.

9. The method according to claim 8, wherein in the second clean a wafer cleaning method with PVA rolling brushes or Pencile brushes is used.