EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
First Claim
1. An apparatus used with an external laser apparatus for generating extreme ultraviolet light, the apparatus comprising:
- a target storage unit configured to store a target material thereinside;
a nozzle unit having a through-hole through which the target material stored inside the target storage unit is outputted, the through-hole formed therein being in fluid communication with the interior of the storage unit;
an electrode facing the nozzle unit, the electrode having a through-hole formed therein;
a target detector configured to detect a target formed of the target material and output a detection signal;
a chamber in which extreme ultraviolet light is generated;
a direct current voltage adjuster configured to apply a direct current between the target material and the electrode, the direct current voltage adjuster being capable of adjusting the direct current;
a pressure adjuster configured to apply a pressure to the target material through gas, the pressure adjuster being capable of adjusting the pressure; and
a controller configured to control at least one of the direct current voltage adjuster and the pressure adjuster based on the detection signal from the target detector.
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Accused Products
Abstract
An apparatus used with an external laser apparatus for generating extreme ultraviolet light includes a target storage unit for storing a target material, a nozzle unit having a through-hole in communication with the interior of the storage unit through which the target material is outputted, an electrode having a through-hole facing the nozzle unit, and a target detector for detecting a target formed of the target material and outputting a detection signal. A direct current voltage adjuster applies and adjusts a direct current between the target material and the electrode, a pressure adjuster applies and adjusts a pressure to the target material through gas, and a controller controls at least one of the direct current voltage adjuster and the pressure adjuster based on the detection signal from the target detector.
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Citations
7 Claims
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1. An apparatus used with an external laser apparatus for generating extreme ultraviolet light, the apparatus comprising:
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a target storage unit configured to store a target material thereinside; a nozzle unit having a through-hole through which the target material stored inside the target storage unit is outputted, the through-hole formed therein being in fluid communication with the interior of the storage unit; an electrode facing the nozzle unit, the electrode having a through-hole formed therein; a target detector configured to detect a target formed of the target material and output a detection signal; a chamber in which extreme ultraviolet light is generated; a direct current voltage adjuster configured to apply a direct current between the target material and the electrode, the direct current voltage adjuster being capable of adjusting the direct current; a pressure adjuster configured to apply a pressure to the target material through gas, the pressure adjuster being capable of adjusting the pressure; and a controller configured to control at least one of the direct current voltage adjuster and the pressure adjuster based on the detection signal from the target detector. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification