PROBE APPARATUS

• US 20130063171A1
• Filed: 03/11/2011
• Published: 03/14/2013
• Est. Priority Date: 03/12/2010
• Status: Active Grant

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Kouno, Isao, Taoka, Ken, Shinohara, Eiichi, Ogasawara, Ikuo
• Granted Patent: US 9,658,285 B2
• Time in Patent Office: Days
• US Class Current: 324/750.25
• CPC Class Codes: G01R 1/0466 concerning contact pieces or mechanical details, e.g. hinges or cams; Shielding
• CPC Class Codes: G01R 31/2608 for testing bipolar transistors
• CPC Class Codes: G01R 31/2886 Features relating to contacting the IC under test, e.g. probe heads; chucks G01R31/2865 takes precedence, test connections, e.g. test sockets, or probes per se, G01R1/04 or G01R1/06

Abstract

A probe apparatus includes a movable mounting table for holding a test object provided with a plurality of power devices including diodes; a probe card arranged above the mounting table with probes; a measuring unit for measuring electrical characteristics of the power devices by bringing the probes into electrical contact with the test object in a state that a conductive film electrode formed on at least a mounting surface of the mounting table is electrically connected to a conductive layer formed on a rear surface of the test object; and a conduction member for electrically interconnecting the conductive film electrode and the measuring unit when measuring the electrical characteristics. The conduction member is interposed between an outer peripheral portion of the probe card and an outer peripheral portion of the mounting table.

Claims

1. A probe apparatus, comprising:

a movable mounting table for holding a test object provided with a plurality of power devices including diodes;

a probe card arranged above the mounting table and provided with a plurality of probes;

a measuring unit for measuring electrical characteristics of the power devices by bringing the probes into electrical contact with the test object in a state that a conductive film electrode formed on at least a mounting surface of the mounting table is electrically connected to a conductive layer formed on a rear surface of the test object placed on the mounting table; and

a conduction member for electrically interconnecting the conductive film electrode of the mounting table and the measuring unit when measuring the electrical characteristics of the power devices, the conduction member being interposed between an outer peripheral portion of the probe card and an outer peripheral portion of the mounting table.

2. The apparatus of claim 1, wherein the conduction member is provided in the probe card to make electrical contact with the conductive film electrode of the mounting table.

3. The apparatus of claim 1 or 2, wherein the conduction member has elasticity.

4. The apparatus of claim 1 or 2, wherein the probes and the conduction member are Kelvin-connected to the measuring unit.

5. The apparatus of claim 1 or 2, wherein the conductive film electrode of the mounting table is made up of a measuring electrode.

6. The apparatus of claim 1 or 2, wherein the mounting table includes a temperature controlling mechanism.

7. A probe apparatus, comprising:

a movable mounting table for holding a test object provided with a plurality of power devices including diodes;

a probe card arranged above the mounting table and provided with a plurality of probes;

a measuring unit for measuring electrical characteristics of the power devices by bringing the probes into electrical contact with the test object in a state that a conductive film electrode formed on a mounting surface and a circumferential surface of the mounting table is electrically connected to a conductive layer formed on a rear surface of the test object placed on the mounting table; and

a conduction mechanism for electrically interconnecting the conductive film electrode formed on the circumferential surface of the mounting table and the measuring unit when measuring the electrical characteristics of the power devices.

8. The apparatus of claim 7, wherein the conduction mechanism includes a lead conductor having a base end portion connected to the conductive film electrode formed on the circumferential surface of the mounting table, a connecting terminal formed in a tip end portion of the lead conductor in a conductible manner, a conductor interposed between the probe card and the mounting table, and an actuator for electrically connecting and disconnecting the connecting terminal to and from the conductor.

9. The apparatus of claim 7, wherein the conduction mechanism includes a plurality of lead conductors provided along the circumferential surface of the mounting table, each of the lead conductors having a base end portion connected to the conductive film electrode formed on the circumferential surface of the mounting table, a plurality of connecting terminals formed in tip end portions of the lead conductors in a conductible manner, a ring-shaped conductor interposed between the probe card and the mounting table, and a plurality of actuators for electrically connecting and disconnecting the connecting terminals to and from the ring-shaped conductor.

10. The apparatus of claim 8 or 9, wherein the actuator is made up of a swing mechanism for swinging the connecting terminal.

11. The apparatus of claim 8 or 9, wherein the actuator is made up of an elevator mechanism for moving the connecting terminal up and down.

12. The apparatus of claim 7, wherein the conduction mechanism includes a circular conductor for moving up and down while making electrical contact with the conductive film electrode formed on the circumferential surface of the mounting table, a plurality of connecting terminals provided at a specified interval along a circumferential direction of the circular conductor, a ring-shaped conductor interposed between the circular conductor and the probe card, and an actuator for moving the circular conductor up and down with respect to the ring-shaped conductor to thereby electrically connect and disconnect the connecting terminals to and from the ring-shaped conductor.

13. The apparatus of claim 7, wherein the conduction mechanism includes a pair of contactors electrically connected to the conductive film electrode formed on the circumferential surface of the mounting table and provided in a mutually 180°

spaced-apart relationship along a circumferential direction of the mounting table, and a pair of split conductors interposed between the mounting table and the probe card such that the contactors make electrical contact with the split conductors.

14. The apparatus of claim 13, wherein the contactors are adjustable depending on a voltage applied.