THERMAL TREATMENT APPARATUS, TEMPERATURE CONTROL SYSTEM, THERMAL TREATMENT METHOD, TEMPERATURE CONTROL METHOD, AND NON-TRANSITORY COMPUTER READABLE MEDIUM EMBODIED WITH PROGRAM FOR EXECUTING THE THERMAL TREATMENT METHOD OR THE TEMPERATURE CONTROL METHOD

• US 20130065189A1
• Filed: 09/12/2012
• Published: 03/14/2013
• Est. Priority Date: 09/13/2011
• Status: Abandoned Application

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Yamaguchi, Tatsuya, Wang, Wenling, Saito, Takanori, Yoshii, Koji
• Application Number:
  US13/611,317
• Publication Number:
  US 20130065189A1
• Time in Patent Office: Days
• US Class Current: 432/9
• CPC Class Codes: C23C 16/463 Cooling of the substrate
• CPC Class Codes: C23C 16/481 by radiant heating of the substrate
• CPC Class Codes: H01L 21/67109 mainly by convection
• CPC Class Codes: H01L 21/67248 Temperature monitoring
• CPC Class Codes: H01L 21/67303 Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
• CPC Class Codes: H01L 21/67757 vertical transfer of a batch of workpieces

Abstract

A thermal treatment apparatus includes a processing container, a substrate holding unit for holding a plurality of substrates at predetermined intervals in a direction inside the processing container, a heating unit for heating the processing container, a supply unit for supplying gas, a plurality of supply ports provided respectively at different locations in the direction, and a cooling unit for cooling the processing container by supplying the gas into the processing container by the supply unit via each of the supply ports, wherein the supply unit is provided in such a way that the supply unit independently controls flow rates of the gases supplied via each of the supply ports.

Claims

1. A thermal treatment apparatus for performing a thermal treatment on a substrate, the thermal treatment apparatus comprising:

a processing container;

a substrate holding unit which holds a plurality of substrates at predetermined intervals in a direction inside the processing container;

a heating unit which heats the processing container; and

a cooling unit which comprises a supply unit for supplying gas and a plurality of supply ports provided respectively at different locations in the direction, and cools the processing container as the supply unit supplies the gas into the processing container via each of the supply ports,

wherein the cooling unit is provided in such a way that the supply unit independently controls flow rates of the gases supplied via each of the supply ports.

2. The thermal treatment apparatus of claim 1, wherein the cooling unit is provided to independently control the flow rates of the gases so that a cooling speed of the processing container is equalized in the direction when cooling the processing container.

3. The thermal treatment apparatus of claim 2, further comprising:

a detecting unit which comprises a plurality of detection devices provided respectively at different locations in the direction and detects temperature distribution in the direction inside the processing container; and

a control unit which independently controls the flow rates of the gases so as to equalize the cooling speed of the processing container in the direction based on the values detected by the detecting unit, when cooling the processing container.

4. The thermal treatment apparatus of claim 3, wherein the heating unit comprises a plurality of heat generating devices provided respectively at different locations in the direction, and

the control unit independently controls the amounts of heat generated by each of the heat generating devices and independently controls the flow rates of the gases so as to equalize the cooling speed of the processing container in the direction based on the values detected by the detecting unit, when cooling the processing container.

5. The thermal treatment apparatus of claim 3, wherein the supply unit is a blower for sending gas,

the cooling unit comprises a plurality of flow rate control valves respectively provided at flow paths via which gases supplied to each of the supply ports from the blower flow, and

the control unit independently controls the flow rates of the gases by controlling air volume of gas sent by the blower and independently controlling each of opening degrees of the flow rate control valves so as to equalize the cooling speed of the processing container in the direction based on the values detected by the detecting unit, when cooling the processing container.

6. The thermal treatment apparatus of claim 1, further comprising a lid unit which is provided to cover around the processing container and defines a space around the processing container, the inside of the space being evacuated via a vent hole,

wherein the cooling unit cools the processing container by supplying gas via each of the supply ports into the space that is evacuated via the vent hole,

the lid unit comprises an opening therein, and the processing container is inserted into the lid unit via the opening, and

an inflow suppressing member is provided in a gap between the lid unit and the processing container in the opening to prevent external air from flowing into the lid unit via the gap.

7. A temperature control system for controlling a temperature of a container extending in a direction, the temperature control system comprising:

a heating unit which heats the container;

a cooling unit which comprises a supply unit for supplying gas and a plurality of supply ports provided respectively at different locations in the direction, and cools the container as the supply unit supplies the gas into the container via each of the supply ports;

a detecting unit which comprises a plurality of detection devices provided respectively at different locations in the direction and detects a temperature distribution in the direction inside the container; and

a control unit which independently controls flow rates of gases supplied by the supply unit via each of the supply ports so as to equalize a cooling speed of the container in the direction based on values detected by the detecting unit, when cooling the container.

8. The temperature control system of claim 7, wherein the heating unit comprises a plurality of heat generating devices provided respectively at different locations in the direction, and the control unit independently controls the amounts of heat generated by the heat generating devices and the flow rates of the gases so as to equalize the cooling speed of the container in the direction based on the values detected by the detecting unit, when cooling the container.

9. The temperature control system of claim 7, wherein the supply unit is a blower for sending gas,

the cooling unit comprises a plurality of flow rate control valves respectively provided at flow paths via which gases supplied to each of the supply ports from the blower flow, and

the control unit independently controls the flow rates of the gases by controlling air volume of gas sent by the blower and independently controlling each of opening degrees of the flow rate control valves so as to equalize the cooling speed of the container in the direction based on the values detected by the detecting unit, when cooling the container.

10. A thermal treatment method used to perform a thermal treatment on a substrate, the method comprising:

when a plurality of substrates are held by a substrate holding unit at predetermined intervals in a direction inside a processing container, performing a thermal treatment on the plurality of substrates held by the substrate holding unit by heating the processing container by a heating unit; and

after the performing of the thermal treatment, cooling the processing container by supplying gas into the processing container by a supply unit via each of a plurality of supply ports provided respectively at different locations in the direction;

wherein the cooling of the processing container comprises independently controlling flow rates of gases supplied by the supply unit via each of the supply ports so as to equalize a cooling speed of the processing container in the direction.

11. The thermal treatment method of claim 10, wherein the cooling of the processing container comprises independently controlling the flow rates so as to equalize the cooling speed of the processing container in the direction based on values detected by a detecting unit that comprises a plurality of detecting devices provided respectively at different locations in the direction and detects a temperature distribution in the direction inside the processing container.

12. The thermal treatment method of claim 11, wherein the heating unit comprises a plurality of heat generating devices provided respectively at different locations in the direction, and the cooling of the processing container comprises independently controlling the amounts of heat generated by the heat generating devices and independently controlling the flow rates of the gases so as to equalize the cooling speed of the processing container in the direction based on the values detected by the detecting unit.

13. The thermal treatment method of claim 11, wherein the supply unit is a blower for sending gas, and the cooling of the processing container comprises independently controlling the flow rates of the gases by controlling air volume of gas sent by the blower and independently controlling a plurality of flow rate control valves respectively provided at flow paths via which gases supplied to each of the supply ports from the blower flow so as to equalize the cooling speed of the processing container in the direction based on the values detected by the detecting unit.

18. A non-transitory computer readable medium embodied with a program for executing the thermal treatment method of claim 10.

14. A temperature control method used to control a temperature of a container extending in a direction, the method comprising:

heating the container by a heating unit; and

cooling the container by supplying gas into the container by a supply unit via each of a plurality of supply ports provided respectively at different locations in the direction;

wherein the cooling of the container comprises independently controlling flow rates of gases supplied by the supply unit via each of the supply ports so as to equalize a cooling speed of the container in the direction.

15. The temperature control method of claim 14, wherein the cooling of the container comprises independently controlling the flow rates so as to equalize the cooling speed of the container in the direction based on values detected by a detecting unit that comprises a plurality of detecting devices provided respectively at different locations in the direction and detects a temperature distribution in the direction inside the container.

16. The temperature control method of claim 15, wherein the heating unit comprises a plurality of heat generating devices provided respectively at different locations in the direction, and the cooling of the container comprises independently controlling the amounts of heat generated by the heat generating devices and independently controlling the flow rates of the gases so as to equalize the cooling speed of the container in the direction based on the values detected by the detecting unit.

17. The temperature control method of claim 15, wherein the supply unit is a blower for sending gas, and the cooling of the container comprises independently controlling the flow rates of the gases by controlling air volume of gas sent by the blower and independently controlling a plurality of flow rate control valves respectively provided at flow paths via which gases supplied to each of the supply ports from the blower flow so as to equalize the cooling speed of the container in the direction based on the values detected by the detecting unit.

19. A non-transitory computer readable medium embodied with a program or executing the temperature control method of claim 14.