THERMAL TREATMENT APPARATUS, TEMPERATURE CONTROL SYSTEM, THERMAL TREATMENT METHOD, TEMPERATURE CONTROL METHOD, AND NON-TRANSITORY COMPUTER READABLE MEDIUM EMBODIED WITH PROGRAM FOR EXECUTING THE THERMAL TREATMENT METHOD OR THE TEMPERATURE CONTROL METHOD
First Claim
1. A thermal treatment apparatus for performing a thermal treatment on a substrate, the thermal treatment apparatus comprising:
- a processing container;
a substrate holding unit which holds a plurality of substrates at predetermined intervals in a direction inside the processing container;
a heating unit which heats the processing container; and
a cooling unit which comprises a supply unit for supplying gas and a plurality of supply ports provided respectively at different locations in the direction, and cools the processing container as the supply unit supplies the gas into the processing container via each of the supply ports,wherein the cooling unit is provided in such a way that the supply unit independently controls flow rates of the gases supplied via each of the supply ports.
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Accused Products
Abstract
A thermal treatment apparatus includes a processing container, a substrate holding unit for holding a plurality of substrates at predetermined intervals in a direction inside the processing container, a heating unit for heating the processing container, a supply unit for supplying gas, a plurality of supply ports provided respectively at different locations in the direction, and a cooling unit for cooling the processing container by supplying the gas into the processing container by the supply unit via each of the supply ports, wherein the supply unit is provided in such a way that the supply unit independently controls flow rates of the gases supplied via each of the supply ports.
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Citations
19 Claims
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1. A thermal treatment apparatus for performing a thermal treatment on a substrate, the thermal treatment apparatus comprising:
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a processing container; a substrate holding unit which holds a plurality of substrates at predetermined intervals in a direction inside the processing container; a heating unit which heats the processing container; and a cooling unit which comprises a supply unit for supplying gas and a plurality of supply ports provided respectively at different locations in the direction, and cools the processing container as the supply unit supplies the gas into the processing container via each of the supply ports, wherein the cooling unit is provided in such a way that the supply unit independently controls flow rates of the gases supplied via each of the supply ports. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A temperature control system for controlling a temperature of a container extending in a direction, the temperature control system comprising:
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a heating unit which heats the container; a cooling unit which comprises a supply unit for supplying gas and a plurality of supply ports provided respectively at different locations in the direction, and cools the container as the supply unit supplies the gas into the container via each of the supply ports; a detecting unit which comprises a plurality of detection devices provided respectively at different locations in the direction and detects a temperature distribution in the direction inside the container; and a control unit which independently controls flow rates of gases supplied by the supply unit via each of the supply ports so as to equalize a cooling speed of the container in the direction based on values detected by the detecting unit, when cooling the container. - View Dependent Claims (8, 9)
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10. A thermal treatment method used to perform a thermal treatment on a substrate, the method comprising:
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when a plurality of substrates are held by a substrate holding unit at predetermined intervals in a direction inside a processing container, performing a thermal treatment on the plurality of substrates held by the substrate holding unit by heating the processing container by a heating unit; and after the performing of the thermal treatment, cooling the processing container by supplying gas into the processing container by a supply unit via each of a plurality of supply ports provided respectively at different locations in the direction; wherein the cooling of the processing container comprises independently controlling flow rates of gases supplied by the supply unit via each of the supply ports so as to equalize a cooling speed of the processing container in the direction. - View Dependent Claims (11, 12, 13, 18)
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14. A temperature control method used to control a temperature of a container extending in a direction, the method comprising:
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heating the container by a heating unit; and cooling the container by supplying gas into the container by a supply unit via each of a plurality of supply ports provided respectively at different locations in the direction; wherein the cooling of the container comprises independently controlling flow rates of gases supplied by the supply unit via each of the supply ports so as to equalize a cooling speed of the container in the direction. - View Dependent Claims (15, 16, 17, 19)
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Specification