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DETECTING MASS ON A MEMS BIOOSCILLATING RESONATOR ARRAY

  • US 20130068025A1
  • Filed: 09/21/2012
  • Published: 03/21/2013
  • Est. Priority Date: 09/21/2011
  • Status: Active Grant
First Claim
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1. A method for determining a mass of an object, the method comprising:

  • generating a first output signal by transmitting an excitation signal through an oscillating resonator array, wherein the oscillating resonator array comprises;

    a first oscillating resonator;

    a second oscillating resonator; and

    an electronic component coupled between the first oscillating resonator and the second oscillating resonator;

    adding an object to a surface of the oscillating resonator array;

    after adding the object, generating a second output signal by transmitting the excitation signal through the oscillating resonator array; and

    determining a phase difference between the first output signal and the second output signal.

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