SLIT VALVE APPARATUS, SYSTEMS, AND METHODS
First Claim
Patent Images
1. A slit valve apparatus, comprising:
- a gate having at least one sealing surface;
a blocker element; and
one or more connector members structurally connecting the gate and the blocker element.
1 Assignment
0 Petitions
Accused Products
Abstract
Slit valve apparatuses are described. In one aspect, a slit valve apparatus is disclosed having a gate with at least one sealing surface, a blocker element, and a connector member that structurally connects the gate and the blocker element. Systems and methods including the slit valve apparatus are also disclosed, as are numerous other aspects.
-
Citations
20 Claims
-
1. A slit valve apparatus, comprising:
-
a gate having at least one sealing surface; a blocker element; and one or more connector members structurally connecting the gate and the blocker element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
-
-
10. An electronic device processing system, comprising:
-
a chamber having an opening; and a slit valve apparatus arranged to seal the opening at a first location, wherein the slit valve apparatus includes; a gate having at least one sealing surface adapted to seal at the first location, a blocker element, and one or more connector members structurally connecting the gate and the blocker element, the blocker element engaging with, and blocking, the opening at a second location spaced from the first location. - View Dependent Claims (11, 12, 13, 14)
-
-
15. A method of transporting a substrate, comprising:
-
providing a chamber having an opening adapted to receive a substrate, and a chamber wall; sealing the opening at a first location with a gate of a slit valve apparatus; and blocking the opening at a second location with a blocking element received proximate to the chamber wall. - View Dependent Claims (16, 17, 18, 19, 20)
-
Specification