SLIT VALVE APPARATUS, SYSTEMS, AND METHODS

• US 20130068391A1
• Filed: 09/10/2012
• Published: 03/21/2013
• Est. Priority Date: 09/15/2011
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Rocha-Alvarez, Juan Carlos, Mazzocco, John J., Du Bois, Dale Robert
• Granted Patent: US 10,023,954 B2
• Time in Patent Office: Days
• US Class Current: 156/345.33
• CPC Class Codes: C23C 14/56 Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
• CPC Class Codes: C23C 16/54 Apparatus specially adapted for continuous coating
• CPC Class Codes: F16K 3/0218 with only one sealing face
• CPC Class Codes: F16K 3/0254 being operated by particular means
• CPC Class Codes: F16K 3/16 with special arrangements for separating the sealing faces or for pressing them together F16K3/10, F16K3/14 take precedence
• CPC Class Codes: F16K 3/22 with sealing faces shaped as surfaces of solids of revolution F16K13/02 takes precedence; with resilient valve members F16K3/28
• CPC Class Codes: F16K 3/314 Forms or constructions of slides; Attachment of the slide to the spindle
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations

Abstract

Slit valve apparatuses are described. In one aspect, a slit valve apparatus is disclosed having a gate with at least one sealing surface, a blocker element, and a connector member that structurally connects the gate and the blocker element. Systems and methods including the slit valve apparatus are also disclosed, as are numerous other aspects.

Claims

1. A slit valve apparatus, comprising:

a gate having at least one sealing surface;

a blocker element; and

one or more connector members structurally connecting the gate and the blocker element.

2. The slit valve apparatus of claim 1, wherein the one or more connector members couple to the gate at a position offset from a physical center of the gate.

3. The slit valve apparatus of claim 1, wherein the one or more connector members couple to the blocker element at a position offset from a physical center of the blocker element.

4. The slit valve apparatus of claim 1, wherein the one or more connector members comprise one or more rods.

5. The slit valve apparatus of claim 1, wherein the one or more connector members comprise a cross sectional area that is less than 25% of a frontal area of a frontal surface of the blocker element.

6. The slit valve apparatus of claim 1, comprising a curved frontal surface on the blocker element.

7. The slit valve apparatus of claim 6, wherein the curved frontal surface on the blocker element includes a radius of curvature that substantially matches a radius of a chamber the blocker element is adapted to interface with.

8. The slit valve apparatus of claim 1, wherein an edge surface on at least some peripheral edges of the blocker element includes an angled interface surface angled at less than 90 degrees from a lateral longitudinal centerline of the blocker element.

9. The slit valve apparatus of claim 1, wherein the blocker element includes an electrically conductive bridge element.

10. An electronic device processing system, comprising:

a chamber having an opening; and

a slit valve apparatus arranged to seal the opening at a first location, wherein the slit valve apparatus includes;

a gate having at least one sealing surface adapted to seal at the first location,

a blocker element, and

one or more connector members structurally connecting the gate and the blocker element, the blocker element engaging with, and blocking, the opening at a second location spaced from the first location.

11. The electronic device processing system of claim 10 wherein the blocker element interfaces with a liner element of the chamber.

12. The electronic device processing system of claim 11 wherein an inner surface of the liner element aligns with an outer surface the blocker element.

13. The electronic device processing system of claim 10 wherein an edge surface on at least some peripheral edges of the blocker element includes an angled interface surface angled at less than 90 degrees from a longitudinal centerline of the blocker element.

14. The electronic device processing system of claim 10 wherein the opening includes a radial recess that receives at least a portion of the blocker element in the radial recess when the slit valve apparatus is in an opened configuration.

15. A method of transporting a substrate, comprising:

providing a chamber having an opening adapted to receive a substrate, and a chamber wall;

sealing the opening at a first location with a gate of a slit valve apparatus; and

blocking the opening at a second location with a blocking element received proximate to the chamber wall.

16. A method of claim 15, comprising connecting the blocking element and the gate with one or more connecting members.

17. A method of claim 15, comprising providing a frontal surface on the blocking element, the frontal surface having a surface profile that is substantially the same as a surface profile of the chamber wall.

18. A method of claim 15, comprising retracting the blocking element into a radial recess formed in the opening between the first location and the second location.

19. A method of claim 15, comprising forming a thermal break between the blocking element and the gate.

20. A method of claim 19, wherein the thermal break is formed by providing one or more connecting members having a cross sectional area that is less than a frontal surface area of a frontal surface of the blocking element.