Dual Scanning Stage
First Claim
1. A stage system, comprising:
- a guide beam for providing translational movement of a first stage and a second stage in a Y axis,the first stage for receiving a first substrate, the first stage slidably mounted to the guide beam, the first stage associated with a first motor for providing independent translational movement for the first stage in an X axis,the second stage for receiving a second substrate, the second stage slidably mounted to the guide beam, the second stage associated with a second motor for providing independent translational movement for the second stage in the X axis,where the first stage and the second stage can only move together in the Y axis, as the guide beam moves in the Y axis, and move independently of one another in the X axis,a robot for loading and unloading substrates onto and off of the first stage and the second stage, anda controller for directing the robot to load a second substrate onto the second stage while simultaneously directing the first stage and the guide beam to scan a first substrate on the first stage in the X and Y axes.
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Abstract
A system having a beam for providing movement of a first stage and a second stage in a Y axis. The first stage receives a first substrate. A first motor provides movement for the first stage in an X axis. The second stage receives a second substrate. A second motor provides movement for the second stage in the X axis. The first stage and the second stage move together in the Y axis and independently in the X axis. A robot loads substrates onto the first stage and the second stage. A controller directs the robot to load a second substrate onto the second stage while simultaneously directing the first stage and the guide beam to scan a first substrate.
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Citations
7 Claims
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1. A stage system, comprising:
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a guide beam for providing translational movement of a first stage and a second stage in a Y axis, the first stage for receiving a first substrate, the first stage slidably mounted to the guide beam, the first stage associated with a first motor for providing independent translational movement for the first stage in an X axis, the second stage for receiving a second substrate, the second stage slidably mounted to the guide beam, the second stage associated with a second motor for providing independent translational movement for the second stage in the X axis, where the first stage and the second stage can only move together in the Y axis, as the guide beam moves in the Y axis, and move independently of one another in the X axis, a robot for loading and unloading substrates onto and off of the first stage and the second stage, and a controller for directing the robot to load a second substrate onto the second stage while simultaneously directing the first stage and the guide beam to scan a first substrate on the first stage in the X and Y axes. - View Dependent Claims (2, 3, 4)
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5. A method of staging a first substrate and a second substrate, the method comprising the steps of:
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loading the first substrate onto a first stage, scanning the first stage in an X axis and a Y axis, loading the second substrate onto a second stage while continuing to scan the first stage, scanning the second stage in the X axis and the Y axis, where movement in the X axis is independent between the first stage and the second stage, and movement in the Y axis is not independent between the first stage and the second stage, and scanning the second stage while the first substrate is unloaded from the first stage. - View Dependent Claims (6, 7)
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Specification