METHOD FOR MANUFACTURING A FLEXIBLE TRANSPARENT 1T1R STORAGE UNIT BASED ON A COMPLETELY LOW-TEMPERATURE PROCESS
First Claim
1. A method for manufacturing a flexible transparent 1T1R storage unit, characterized in that it includes the following steps:
- provide a flexible substrate;
form a gate electrode on the flexible substrate;
cover the gate electrode to form a gate oxide layer;
form a transparent oxide channel on the gate oxide layer;
form a source and drain electrodes on both sides of the oxide channel;
form an oxide resistive storage layer on the drain electrode;
form a top-electrode on the oxide resistive storage layer.
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Abstract
The present invention belongs to the technical field of low temperature atomic layer deposition technology, and specifically relates to a method for manufacturing a flexible transparent 1T1R storage unit. In the present invention, a fully transparent 1T1R storage unit is developed on a flexible substrate through a completely low-temperature process, including an oxide layer dielectric, a transparent electrode and a transparent substrate which are deposited together through a low-temperature process, thus realizing a fully transparent device capable of achieving the functions of nontransparent devices. The present invention can be applied to the manufacturing of flexible low-temperature storage units in the future, as well as changing the packaging and existing modes of devices, which will make foldable and bendable portable storage units possible.
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Citations
8 Claims
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1. A method for manufacturing a flexible transparent 1T1R storage unit, characterized in that it includes the following steps:
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provide a flexible substrate; form a gate electrode on the flexible substrate; cover the gate electrode to form a gate oxide layer; form a transparent oxide channel on the gate oxide layer; form a source and drain electrodes on both sides of the oxide channel; form an oxide resistive storage layer on the drain electrode; form a top-electrode on the oxide resistive storage layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification