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METHOD FOR MANUFACTURING A FLEXIBLE TRANSPARENT 1T1R STORAGE UNIT BASED ON A COMPLETELY LOW-TEMPERATURE PROCESS

  • US 20130078761A1
  • Filed: 06/20/2012
  • Published: 03/28/2013
  • Est. Priority Date: 09/23/2011
  • Status: Abandoned Application
First Claim
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1. A method for manufacturing a flexible transparent 1T1R storage unit, characterized in that it includes the following steps:

  • provide a flexible substrate;

    form a gate electrode on the flexible substrate;

    cover the gate electrode to form a gate oxide layer;

    form a transparent oxide channel on the gate oxide layer;

    form a source and drain electrodes on both sides of the oxide channel;

    form an oxide resistive storage layer on the drain electrode;

    form a top-electrode on the oxide resistive storage layer.

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