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HEAT TREATMENT METHOD FOR HEATING SUBSTRATE BY IRRADIATING SUBSTRATE WITH FLASH OF LIGHT

  • US 20130078822A1
  • Filed: 09/05/2012
  • Published: 03/28/2013
  • Est. Priority Date: 09/27/2011
  • Status: Active Grant
First Claim
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1. A method of heating a substrate by irradiating the substrate with a flash of light, the method comprising the steps of:

  • (a) supporting a substrate on a support member;

    (b) irradiating an upper surface of the substrate supported on said support member with a first flash of light to cause said substrate to jump up from said support member; and

    (c) irradiating the upper surface of said substrate with a second flash of light to perform a heating treatment while said substrate is jumping in midair above said support member.

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