SEMICONDUCTOR MEMORY DEVICE AND METHOD OF OPERATING THE SAME
First Claim
1. A semiconductor memory device, comprising:
- a memory string including memory cells formed by word lines covering a vertical semiconductor layer on a semiconductor substrate at different heights, the memory string coupled between a bit line and a source line;
a control circuit configured to control an erase operation of the memory cells, a first erase verify operation of even memory cells coupled to even word lines among the word lines and a second erase verify operation of odd memory cells coupled to odd word lines; and
an operation circuit, controlled by the control circuit, performing the erase operation of the memory cells, applying a first voltage to the odd word lines to form channels in the odd memory cells and channels in the vertical semiconductor layer between the odd word lines and the even word lines when the first erase verify operation is performed, and applying the first voltage to the even word lines to form channels in the even memory cells and channels in the vertical semiconductor layer between the even word lines and the odd word lines when the second erase verify operation is performed.
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Abstract
A semiconductor memory device includes a memory string including memory cells formed by word lines covering a vertical semiconductor layer on a semiconductor substrate at different heights, the memory string coupled between a bit line and a source line, a control circuit configured to control an erase operation of the memory cells, a first erase verify operation of the memory cells coupled to even word lines, and a second erase verify operation of the memory cells coupled to odd word lines, and an operation circuit, performing the erase operation of the memory cells, applying a first voltage to the odd and even word lines to form a channel in the vertical semiconductor layer between the odd and even word lines when the first and second erase verify operations are performed, respectively.
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Citations
20 Claims
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1. A semiconductor memory device, comprising:
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a memory string including memory cells formed by word lines covering a vertical semiconductor layer on a semiconductor substrate at different heights, the memory string coupled between a bit line and a source line; a control circuit configured to control an erase operation of the memory cells, a first erase verify operation of even memory cells coupled to even word lines among the word lines and a second erase verify operation of odd memory cells coupled to odd word lines; and an operation circuit, controlled by the control circuit, performing the erase operation of the memory cells, applying a first voltage to the odd word lines to form channels in the odd memory cells and channels in the vertical semiconductor layer between the odd word lines and the even word lines when the first erase verify operation is performed, and applying the first voltage to the even word lines to form channels in the even memory cells and channels in the vertical semiconductor layer between the even word lines and the odd word lines when the second erase verify operation is performed. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 17, 18, 19)
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10. A method of operating a semiconductor memory device, the method comprising:
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performing an erase operation on memory cells formed by word lines covering a vertical semiconductor layer on a semiconductor substrate at different heights, the memory cells coupled between a bit line and a source line and; forming a channel in the vertical semiconductor layer between odd word lines among the word lines; performing a first erase verify operation by applying a second voltage to even word lines among the word lines; forming a channel in the vertical semiconductor layer between the even word lines; and performing a second erase verify operation by applying the second voltage to the odd word lines. - View Dependent Claims (11, 12, 13, 14, 15, 16, 20)
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Specification