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ADVANCED ATOMIC FORCE MICROSCOPY SCANNING FOR OBTAINING A TRUE SHAPE

  • US 20130081159A1
  • Filed: 07/26/2012
  • Published: 03/28/2013
  • Est. Priority Date: 07/29/2011
  • Status: Abandoned Application
First Claim
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1. A method comprising:

  • performing a first atomic force microscope (AFM) scan of a sample at a first position at a first angle to produce a first scan image;

    performing a second AFM scan of the sample at the first position at a second angle to produce a second scan image; and

    correcting a first error in the first scan image based on the second scan image to produce a corrected image output.

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