INERTIAL SENSOR AND ANGULAR VELOCITY DETECTION METHOD USING THE SAME

• US 20130081465A1
• Filed: 08/22/2012
• Published: 04/04/2013
• Est. Priority Date: 09/29/2011
• Status: Active Grant

• Current Assignee: Samsung Electro-Mechanics Co., Ltd. (Samsung Group)
• Original Assignee: Samsung Electro-Mechanics Co., Ltd. (Samsung Group)
• Inventors: Kim, Jong Woon, Lin, Liwei, Mao, Minyao, Jeung, Won Kyu
• Granted Patent: US 8,789,418 B2
• Time in Patent Office: Days
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/574 the devices having two sensing masses in anti-phase motion

Abstract

Disclosed herein is an inertial sensor. The inertial sensor includes: a plurality of driving masses; support bodies supporting the driving masses so as to freely move in a state in which the driving masses float; a connection bridge connecting the plurality of driving masses and connecting the plurality of driving masses with the support bodies; and an electrode pattern part including driving electrodes simultaneously driving the driving masses and sensing electrode detecting axial Coriolis force of each of the driving masses.

Claims

1. An inertial sensor, comprising:

a plurality of driving masses;

support bodies supporting the driving masses so as to freely move in a state in which the driving masses float;

a connection bridge connecting the plurality of driving masses and connecting the plurality of driving masses with the support bodies; and

an electrode pattern part including driving electrodes simultaneously driving the driving masses and sensing electrode detecting axial Coriolis force of each of the driving masses.

2. The inertial sensor as set forth in claim 1, wherein the driving mass includes a first driving mass and a second driving mass having the same size and the first driving mass and the second driving mass are connected with each other by the connection bridge.

3. The inertial sensor as set forth in claim 1, wherein the connection bridge includes:

a coupling bridge connecting the plurality of driving masses;

a first connection bridge connecting each of the plurality of driving masses with the support bodies in a first-axis direction; and

a second connection bridge connecting each of the plurality of driving masses with the support bodies in a second-axis direction orthogonal to the first-axis direction.

4. The inertial sensor as set forth in claim 3, wherein the coupling bridge, the first connection bridge, and the second connection bridge have the same thickness, a width of the first connection bridge is formed to be larger than that of the second connection bridge, and a width of the second connection bridge is formed to be larger than that of the coupling bridge.

5. The inertial sensor as set forth in claim 1, wherein the driving electrodes of the electrode pattern part are formed at the connection bridges at both sides of the plurality of driving masses.

6. The inertial sensor as set forth in claim 1, wherein the sensing electrode of the electrode pattern part includes a first sensing electrode connecting the driving masses and formed at the connection bridge extending in the first-axis direction and a second sensing electrode formed at the connection bridge extending in a second axis direction extending in a direction orthogonal to the first-axis direction.

7. The inertial sensor as set forth in claim 6, wherein the first and second sensing electrodes are adjacently formed to the driving masses in order to improve sensitivity.

8. An angular velocity detection method using the inertial sensor as set forth in claim 1, comprising:

simultaneously driving a plurality of driving masses;

selectively vibrating the plurality of driving masses in an in-phase and an inverse phase with respect to X-axis and Z-axis directions of the plurality of driving masses;

detecting in-phase component or inverse phase component of Y-axial Coriolis force by the X-axial in-phase or inverse phase vibration and detecting inverse phase or in-phase component of X-axial/Y-axial Coriolis force by the Z-axial inverse phase or in-phase vibration; and

calculating Z-axial angular velocity Ω

X by the inverse phase or in-phase component of the Y-axial Coriolis force, calculating Y-axial angular velocity Ω

Y by the inverse phase or in-phase component of the X-axial Coriolis force, and calculating X-axial angular velocity Ω

X by the in-phase or inverse phase component of the Y-axial Coriolis force.