STAMPER, IMPRINT DEVICE, PRODUCT PROCESSED BY IMPRINT DEVICE, DEVICE FOR MANUFACTURING PRODUCT PROCESSED BY IMPRINT DEVICE, AND METHOD FOR MANUFACTURING PRODUCT PROCESSED BY IMPRINT DEVICE

• US 20130082029A1
• Filed: 08/02/2012
• Published: 04/04/2013
• Est. Priority Date: 09/29/2011
• Status: Abandoned Application

• Current Assignee: Hitachi High-Technologies Corporation (Hitachi, Ltd.)
• Original Assignee: Hitachi High-Technologies Corporation (Hitachi, Ltd.)
• Inventors: MORI, Kyoichi, MARUYAMA, Makoto, MIYAUCHI, Akihiro, OGINO, Masahiko, HATOGAI, Tetsuhiro
• Application Number:
  US13/565,279
• Publication Number:
  US 20130082029A1
• Time in Patent Office: Days
• US Class Current: 216/40
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
• CPC Class Codes: Y10T 428/24479 including variation in thickness

Abstract

The object of the present invention is to provide a stamper or an imprint device which can reduce a variation of a base film thickness, a product processed and having a precise fine pattern, and a device for manufacturing a product processed or a method for manufacturing a product processed which can form a precise fine pattern. According to the present invention, in a stamper, an imprint device performing an imprint using the stamper, a device for manufacturing a product processed by the imprint device, a method for manufacturing a product processed by the imprint, and a product processed and manufactured, the stamper has a dummy pattern which is unnecessary for fulfilling a function of the product processed which is formed of a substrate for the product.

Claims

1. An imprint device comprising a stamper having concavely and convexly shaped patterns on a surface thereof;

and an energy source hardening a formation material which is formed on a surface of a substrate of a product processed and into which the patterns of the stamper are transferred;

wherein the stamper includes a dummy pattern which is unnecessary for fulfilling a function of a product processed which is formed from the substrate of the product processed.

2. The imprint device according to claim 1, wherein the dummy pattern is a pattern which is provided in addition to regular patterns which are required for fulfilling a function of the product processed.

3. The imprint device according to claim 1, wherein the dummy pattern is a pattern which planarly enlarges regular patterns that fulfill a function of the product processed.

4. The imprint device according to claim 3, wherein the dummy pattern is a pattern which more enlarges the regular patterns having area large as compared to other regular patterns.

5. The imprint device according to claim 1, wherein the dummy pattern is a pattern which has a depth more than a depth required for regular patterns fulfilling a function of the product processed.

6. The imprint device according to claim 1, wherein the dummy pattern is provided in such a manner that a thickness of a base film, which the patterns transferred into the formation material commonly have, becomes even.

7. A device for manufacturing a product processed, comprising an application device applying a formation material onto a surface of a substrate of a product processed;

the substrate finally becoming the product processed;

an imprint device transferring concavely and convexly shaped patterns, which a stamper has, into the applied formation material; and

an etching device etching the substrate using the transferred patterns as a mask;

wherein the stamper has a dummy pattern which is unnecessary for fulfilling a function of the product processed which is formed from the substrate.

8. The device according to claim 7, wherein the imprint device includes the stamper which has the dummy pattern provided in addition to regular patterns which fulfill a function of the product processed.

9. The device according to claim 7, wherein the imprint device includes the dummy pattern which planarly enlarges regular patterns which fulfill a function of the product processed.

10. The device according to claim 7, wherein the imprint device includes the stamper which has the dummy pattern having a depth more than a depth required for regular patterns fulfilling a function of the product processed.

11. The device according to claim 8, wherein the product processed is a magnetic disc which has concentrically circular shaped regular pattern having servo patterns and data on a doughnut-shaped disc, and wherein the imprint device transfers the dummy pattern into inside and outside regions of the doughnut-shaped disc, or into the regular pattern regions of the magnetic disc.

12. The device according to claim 8, wherein the product processed is a SAW device that is a high frequency device, and wherein the imprint device transfers the dummy pattern into a filter portion which the SAW device has.

13. The device according to claim 9, wherein the product processed is a SAW device that is a high frequency device, and wherein the imprint device transfers the dummy pattern into an electrode portion or an earth portion which the SAW device has.

14. A method for manufacturing a product processed, comprising the steps of applying a formation material onto a surface of a substrate of a product processed which finally become the product processed;

transferring concave and convex patterns, which a stamper has, into the applied formation material; and

etching the substrate using the transferred patterns as a mask;

the transferring is performed by transferring a dummy pattern which is unnecessary for fulfilling a function of the product processed which is formed from the substrate.

15. The method according to claim 14, wherein the product processed is a magnetic disc which has concentrically circular shaped regular pattern having servo patterns and data on a doughnut-shaped disc, and wherein the transferring is performed by transferring the dummy pattern, which is provided in addition to regular patterns fulfilling a function of the product processed, into inside and outside regions of the doughnut-shaped disc, or into the regular pattern regions of the magnetic disc.

16. The method according to claim 14, wherein the product processed is a SAW device that is a high frequency device, and wherein the transferring is performed by transferring the dummy pattern, which is provided in addition to regular patterns fulfilling a function of the product processed, into a filter portion which the SAW device has.

17. The method according to claim 14, wherein the product processed is a SAW device that is a high frequency device, and wherein the transferring is performed by transferring the dummy pattern, which planarly enlarges regular patterns fulfilling a function of the product processed, into an electrode pad portion or earth portion which the SAW device has.

18. A product processed, the product being manufactured by applying a formation material onto a surface of a substrate of the product, transferring concave and convex patterns, which a stamper has, into the applied formation material, and etching the substrate using the transferred patterns as a mask;

wherein the product processed includes a dummy pattern which is unnecessary for fulfilling a function of the product processed.

19. The product according to claim 18, wherein the dummy pattern a pattern which is provided in addition to regular patterns fulfilling a function of the product processed.

20. The product according to claim 18, wherein the dummy pattern is a pattern which planarly enlarges regular patterns fulfilling a function of the product processed.

21. A stamper having concave and convex patterns on a surface thereof and transferring the concave and convex patterns into a formation material which is applied onto a surface of a substrate a product processed;

wherein the stamper includes a dummy pattern which is unnecessary for fulfilling a function of the product which is formed from the substrate.

22. The stamper according to claim 21, wherein the dummy pattern is a pattern which is provided in addition to regular patterns fulfilling a function of the product processed.

23. The stamper according to claim 21, wherein the dummy pattern is a pattern which planarly enlarges regular patterns fulfilling a function of the product processed.

24. The stamper according to claim 21, wherein the dummy pattern is a pattern which has a depth more than a depth required for regular patterns fulfilling a function of the product processed.