STAMPER, IMPRINT DEVICE, PRODUCT PROCESSED BY IMPRINT DEVICE, DEVICE FOR MANUFACTURING PRODUCT PROCESSED BY IMPRINT DEVICE, AND METHOD FOR MANUFACTURING PRODUCT PROCESSED BY IMPRINT DEVICE
First Claim
1. An imprint device comprising a stamper having concavely and convexly shaped patterns on a surface thereof;
- and an energy source hardening a formation material which is formed on a surface of a substrate of a product processed and into which the patterns of the stamper are transferred;
wherein the stamper includes a dummy pattern which is unnecessary for fulfilling a function of a product processed which is formed from the substrate of the product processed.
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Abstract
The object of the present invention is to provide a stamper or an imprint device which can reduce a variation of a base film thickness, a product processed and having a precise fine pattern, and a device for manufacturing a product processed or a method for manufacturing a product processed which can form a precise fine pattern. According to the present invention, in a stamper, an imprint device performing an imprint using the stamper, a device for manufacturing a product processed by the imprint device, a method for manufacturing a product processed by the imprint, and a product processed and manufactured, the stamper has a dummy pattern which is unnecessary for fulfilling a function of the product processed which is formed of a substrate for the product.
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Citations
24 Claims
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1. An imprint device comprising a stamper having concavely and convexly shaped patterns on a surface thereof;
- and an energy source hardening a formation material which is formed on a surface of a substrate of a product processed and into which the patterns of the stamper are transferred;
wherein the stamper includes a dummy pattern which is unnecessary for fulfilling a function of a product processed which is formed from the substrate of the product processed. - View Dependent Claims (2, 3, 4, 5, 6)
- and an energy source hardening a formation material which is formed on a surface of a substrate of a product processed and into which the patterns of the stamper are transferred;
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7. A device for manufacturing a product processed, comprising an application device applying a formation material onto a surface of a substrate of a product processed;
- the substrate finally becoming the product processed;
an imprint device transferring concavely and convexly shaped patterns, which a stamper has, into the applied formation material; and
an etching device etching the substrate using the transferred patterns as a mask;wherein the stamper has a dummy pattern which is unnecessary for fulfilling a function of the product processed which is formed from the substrate. - View Dependent Claims (8, 9, 10, 11, 12, 13)
- the substrate finally becoming the product processed;
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14. A method for manufacturing a product processed, comprising the steps of applying a formation material onto a surface of a substrate of a product processed which finally become the product processed;
- transferring concave and convex patterns, which a stamper has, into the applied formation material; and
etching the substrate using the transferred patterns as a mask;
the transferring is performed by transferring a dummy pattern which is unnecessary for fulfilling a function of the product processed which is formed from the substrate. - View Dependent Claims (15, 16, 17)
- transferring concave and convex patterns, which a stamper has, into the applied formation material; and
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18. A product processed, the product being manufactured by applying a formation material onto a surface of a substrate of the product, transferring concave and convex patterns, which a stamper has, into the applied formation material, and etching the substrate using the transferred patterns as a mask;
wherein the product processed includes a dummy pattern which is unnecessary for fulfilling a function of the product processed. - View Dependent Claims (19, 20)
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21. A stamper having concave and convex patterns on a surface thereof and transferring the concave and convex patterns into a formation material which is applied onto a surface of a substrate a product processed;
wherein the stamper includes a dummy pattern which is unnecessary for fulfilling a function of the product which is formed from the substrate. - View Dependent Claims (22, 23, 24)
Specification