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Pre-charged CMUTs for zero-external-bias operation

  • US 20130088118A1
  • Filed: 10/10/2012
  • Published: 04/11/2013
  • Est. Priority Date: 10/11/2011
  • Status: Active Grant
First Claim
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1. A capacitive micromachined ultrasonic transducer (CMUT) comprising:

  • a substrate;

    a CMUT plate disposed above the substrate;

    a substrate electrode disposed on the substrate;

    a plate electrode disposed on the CMUT plate;

    a floating electrode disposed either on the substrate or on the CMUT plate, wherein the floating electrode has no electrical connection to the substrate electrode or to the plate electrode; and

    wherein an electrical DC bias of the CMUT is provided in part or in full by charges trapped on the floating electrode.

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