PIEZORESISTIVE TYPE Z-AXIS ACCELEROMETER
First Claim
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1. A piezoresistive type Z-axis accelerometer, comprising:
- a substrate;
a plurality of anchors formed over the substrate;
a plurality of cantilever beams, wherein the cantilever beams comprise a piezoresistive material; and
a proof mass, wherein the proof mass is suspended over the substrate by respectively connecting the proof mass with the anchors, and the accelerometer senses a movement of the proof mass by the piezoresistive material.
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Abstract
A pizeoresistive type Z-axis accelerometer is provided, including a substrate; a plurality of anchors formed over the substrate; a plurality of cantilever beams, wherein the cantilever beams include a piezoresistive material; and a proof mass, wherein the proof mass is suspended over the substrate by respectively connecting the proof mass with the anchors, and the accelerometer senses a movement of the proof mass by the piezoresistive material.
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Citations
13 Claims
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1. A piezoresistive type Z-axis accelerometer, comprising:
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a substrate; a plurality of anchors formed over the substrate; a plurality of cantilever beams, wherein the cantilever beams comprise a piezoresistive material; and a proof mass, wherein the proof mass is suspended over the substrate by respectively connecting the proof mass with the anchors, and the accelerometer senses a movement of the proof mass by the piezoresistive material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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Specification