MANUFACTURING METHOD OF SOLID STATE LIGHT EMITTING ELEMENT
First Claim
1. A manufacturing method of a solid state light emitting element, the method comprising:
- providing a first substrate;
forming a plurality of protrusion structures separated to each other on the first substrate;
forming a buffer layer on the protrusion structures, wherein the buffer layer fills the gaps between the protrusion structures;
forming an epitaxial growth layer on the buffer layer to form a first semiconductor stacking structure, wherein the epitaxial growth layer is constituted by a second type semiconductor epitaxial layer, an active layer and a first type semiconductor epitaxial layer in sequence;
inverting the first semiconductor stacking structure to a second substrate, so that the first semiconductor epitaxial layer and the second substrate are connected to form a second semiconductor stacking structure;
processing the second semiconductor stacking structure by a first etchant solution, which etches the buffer layer completely to form a third semiconductor stacking structure;
processing the third semiconductor stacking structure by a second etchant solution, which permeates through the gaps between the protrusion structures located between the first substrate and the second type semiconductor epitaxial layer to etch the protrusion structures completely; and
removing the first substrate from the third semiconductor stacking structure to form a fourth semiconductor stacking structure constituted by the second substrate and the epitaxial growth layer disposed thereon.
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Abstract
A manufacturing method of a solid state light emitting element is provided. A plurality of protrusion structures separated to each other are formed on a first substrate. A buffer layer is formed on the protrusion structures and fills the gaps between protrusion structures. An epitaxial growth layer is formed on the buffer layer to form a first semiconductor stacking structure. The first semiconductor stacking structure is inverted to a second substrate, so that the first semiconductor epitaxial layer and the second substrate are connected to form a second semiconductor stacking structure. The buffer layer is etched by a first etchant solution to form a third semiconductor stacking structure. A second etchant solution is used to permeate through the gaps between the protrusion structures, so that the protrusion structures are etched completely. The first substrate is removed from the third semiconductor stacking structure to form a fourth semiconductor stacking structure.
19 Citations
20 Claims
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1. A manufacturing method of a solid state light emitting element, the method comprising:
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providing a first substrate; forming a plurality of protrusion structures separated to each other on the first substrate; forming a buffer layer on the protrusion structures, wherein the buffer layer fills the gaps between the protrusion structures; forming an epitaxial growth layer on the buffer layer to form a first semiconductor stacking structure, wherein the epitaxial growth layer is constituted by a second type semiconductor epitaxial layer, an active layer and a first type semiconductor epitaxial layer in sequence; inverting the first semiconductor stacking structure to a second substrate, so that the first semiconductor epitaxial layer and the second substrate are connected to form a second semiconductor stacking structure; processing the second semiconductor stacking structure by a first etchant solution, which etches the buffer layer completely to form a third semiconductor stacking structure; processing the third semiconductor stacking structure by a second etchant solution, which permeates through the gaps between the protrusion structures located between the first substrate and the second type semiconductor epitaxial layer to etch the protrusion structures completely; and removing the first substrate from the third semiconductor stacking structure to form a fourth semiconductor stacking structure constituted by the second substrate and the epitaxial growth layer disposed thereon. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification