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REUSABLE SUBSTRATES FOR ELECTRONIC DEVICE FABRICATION AND METHODS THEREOF

  • US 20130095640A1
  • Filed: 04/04/2012
  • Published: 04/18/2013
  • Est. Priority Date: 04/08/2011
  • Status: Active Grant
First Claim
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1. A reusable substrate with at least a plurality of grooves for electronic device fabrication, said substrate comprising:

  • a substrate body made of one or more substrate materials and including a top planar surface, the top planar surface being divided into a plurality of planer regions by the plurality of grooves, the plurality of grooves including a plurality of bottom planar surfaces;

    wherein;

    each of the plurality of grooves includes a bottom planar surface and two side surfaces, the bottom planar surface being selected from the plurality of bottom planar surfaces, the two side surfaces being in contact with the top surface and the bottom surface;

    the bottom planar surface is associated with a groove width from one of the two side surfaces to the other of the two side surfaces, the groove width ranging from 0.1 μ

    m to 5 mm; and

    the two side surfaces are associated with a groove depth from the top planar surface to the bottom planar surface, the groove depth ranging from 1 nm to 500 μ

    M;

    wherein;

    each of the plurality of regions is surrounded by a first groove, a second groove, a third groove and a fourth groove, all of the first groove, the second groove, the third groove and the fourth groove being selected from the plurality of grooves;

    the first groove and the second groove are parallel to each other and separated by a first groove interval ranging from 0.1 mm to 50 mm;

    the third groove and the fourth groove are parallel to each other and separated by a second groove interval ranging from 0.1 mm to 50 mm; and

    the first groove and the third groove are perpendicular to each other;

    wherein;

    the top planar surface is parallel to each of the plurality of bottom surfaces, the top planar surface being associated with a first surface area, the plurality of bottom surfaces together being associated with a second surface area; and

    the second surface area is equal to or less than 10% of a sum of the first surface area and the second surface area.

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