MICROMECHANICAL COMPONENT AND METHOD FOR MANUFACTURING A MICROMECHANICAL COMPONENT
First Claim
1. A micromechanical component, comprising:
- a substrate;
a seismic weight joined to the substrate at a first suspension mount;
at least one first electrode for measuring a motion of the seismic weight in a first direction, the first electrode being joined to the substrate at a second suspension mount; and
at least one second electrode for measuring a motion of the seismic weight in a second direction different from the first direction, the second electrode being joined to the substrate at a third suspension mount;
wherein the first electrode is set apart from the second suspension mount and mechanically connected to the second suspension mount with the aid of a support arm.
1 Assignment
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Accused Products
Abstract
A micromechanical component includes: a substrate; a seismic weight joined to the substrate at a first suspension mount; at least one first electrode for measuring a motion of the seismic weight in a first direction, the first electrode being joined to the substrate at a second suspension mount; and at least one second electrode for measuring a motion of the seismic weight in a second direction different from the first direction, the second electrode being joined to the substrate at a third suspension mount. The first electrode is mechanically connected to the second suspension mount with the aid of a support arm and set apart from the second suspension mount.
26 Citations
9 Claims
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1. A micromechanical component, comprising:
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a substrate; a seismic weight joined to the substrate at a first suspension mount; at least one first electrode for measuring a motion of the seismic weight in a first direction, the first electrode being joined to the substrate at a second suspension mount; and at least one second electrode for measuring a motion of the seismic weight in a second direction different from the first direction, the second electrode being joined to the substrate at a third suspension mount; wherein the first electrode is set apart from the second suspension mount and mechanically connected to the second suspension mount with the aid of a support arm. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification