SILICON SUBMOUNT FOR LIGHT EMITTING DIODE AND METHOD OF FORMING THE SAME
First Claim
1. A silicon submount for a light emitting diode, comprising:
- a silicon base having an upper surface and a lower surface, a recess being disposed at the upper surface;
a first insulating layer covering the upper surface and the lower surface of the silicon base;
a first electrode and a second electrode disposed on the first insulating layer on a bottom of the recess; and
a reflective layer disposed on the first insulating layer on a sidewall of the recess,wherein the first electrode, the second electrode, and the reflective layer are separated from one another, and a material of the first electrode, a material of the second electrode, and a material of the reflective layer are the same.
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Accused Products
Abstract
A silicon submount for a light emitting diode (LED) including a silicon base, a first insulating layer, a first electrode, a second electrode, and a reflective layer is provided. The silicon base has an upper surface and a lower surface, and a recess is disposed at the upper surface. The first insulating layer covers the upper surface and the lower surface of the silicon base. The first electrode and the second electrode are disposed on the first insulating layer on a bottom of the recess. The reflective layer is disposed on the first insulating layer on a sidewall of the recess. The first electrode, the second electrode, and the reflective layer are separated from one another and formed by the same material.
27 Citations
18 Claims
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1. A silicon submount for a light emitting diode, comprising:
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a silicon base having an upper surface and a lower surface, a recess being disposed at the upper surface; a first insulating layer covering the upper surface and the lower surface of the silicon base; a first electrode and a second electrode disposed on the first insulating layer on a bottom of the recess; and a reflective layer disposed on the first insulating layer on a sidewall of the recess, wherein the first electrode, the second electrode, and the reflective layer are separated from one another, and a material of the first electrode, a material of the second electrode, and a material of the reflective layer are the same. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method of forming a silicon submount for a light emitting diode, comprising:
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providing a silicon substrate, wherein the silicon substrate has an upper surface and a lower surface; forming a plurality of recesses at the upper surface of the silicon substrate; forming a first insulating layer on the upper surface and the lower surface of the silicon substrate; forming a metal layer on the upper surface of the silicon substrate; and patterning the metal layer to form a first electrode and a second electrode on the first insulating layer on a bottom of each of the recesses and to form a reflective layer on the first insulating layer on a sidewall of each of the recesses. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification