SHOWER PLATE, MANUFACTURING METHOD OF THE SHOWER PLATE, AND PLASMA PROCESSING APPARATUS USING THE SHOWER PLATE

• US 20130112337A1
• Filed: 12/28/2012
• Published: 05/09/2013
• Est. Priority Date: 06/13/2006
• Status: Abandoned Application

• Current Assignee: National University Corporation Chiba University, Tokyo Electron Limited
• Original Assignee: National University Corporation Chiba University, Tokyo Electron Limited
• Inventors: Okesaku, Masahiro, Goto, Tetsuya, Ohmi, Tadahiro, Ishibashi, Kiyotaka
• Application Number:
  US13/729,547
• Publication Number:
  US 20130112337A1
• Time in Patent Office: Days
• US Class Current: 156/89.11
• CPC Class Codes: B05B 1/18 Roses; Shower heads with means for adding soap or the like E03C1/046; jet regulators E03C1/08
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/45568 Porous nozzles
• CPC Class Codes: C23C 16/511 using microwave discharges
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01J 37/32449 Gas control, e.g. control of the gas flow

Abstract

A manufacturing method of a shower plate includes inserting a green body, a degreasing body, a temporary sintered body or a sintered body of a ceramic member, which has a plurality of gas discharge holes or gas flow holes, into a longitudinal hole of a green body, a degreasing body or a temporary sintered body of the shower plate, which has been formed by power ingredients; and sintering them simultaneously.

Claims

1. A manufacturing method of a shower plate comprising:

inserting a green body, a degreasing body, a temporary sintered body or a sintered body of a ceramic member, which has a plurality of gas discharge holes or gas flow holes, into a longitudinal hole of a green body, a degreasing body or a temporary sintered body of the shower plate, which has been formed by power ingredients; and

sintering them simultaneously.

2. A shower plate manufactured by the manufacturing method of claim 1.

3. A plasma processing apparatus using the shower plate of claim 2.