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SHOWER PLATE, MANUFACTURING METHOD OF THE SHOWER PLATE, AND PLASMA PROCESSING APPARATUS USING THE SHOWER PLATE

  • US 20130112337A1
  • Filed: 12/28/2012
  • Published: 05/09/2013
  • Est. Priority Date: 06/13/2006
  • Status: Abandoned Application
First Claim
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1. A manufacturing method of a shower plate comprising:

  • inserting a green body, a degreasing body, a temporary sintered body or a sintered body of a ceramic member, which has a plurality of gas discharge holes or gas flow holes, into a longitudinal hole of a green body, a degreasing body or a temporary sintered body of the shower plate, which has been formed by power ingredients; and

    sintering them simultaneously.

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