×

COMPOSITE OXIDE SINTERED BODY AND SPUTTERING TARGET COMPRISING SAME

  • US 20130112971A1
  • Filed: 12/28/2012
  • Published: 05/09/2013
  • Est. Priority Date: 12/12/2008
  • Status: Active Grant
First Claim
Patent Images

1. A composite oxide sintered body comprising In, Zn, and Sn, and having a relative density of 90% or more, an average crystal grain size of 10 μ

  • m or less, and a bulk resistance of 30 mΩ

    cm or less, the number of tin oxide aggregate particles having a diameter of 10 μ

    m or more being 2.5 or less per mm2.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×