COMPOSITE OXIDE SINTERED BODY AND SPUTTERING TARGET COMPRISING SAME
First Claim
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1. A composite oxide sintered body comprising In, Zn, and Sn, and having a relative density of 90% or more, an average crystal grain size of 10 μ
- m or less, and a bulk resistance of 30 mΩ
cm or less, the number of tin oxide aggregate particles having a diameter of 10 μ
m or more being 2.5 or less per mm2.
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Abstract
A composite oxide sintered body includes In, Zn, and Sn, and has a relative density of 90% or more, an average crystal grain size of 10 μm or less, and a bulk resistance of 30 mΩcm or less, the number of tin oxide aggregate particles having a diameter of 10 μm or more being 2.5 or less per mm2 of the composite oxide sintered body.
16 Citations
12 Claims
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1. A composite oxide sintered body comprising In, Zn, and Sn, and having a relative density of 90% or more, an average crystal grain size of 10 μ
- m or less, and a bulk resistance of 30 mΩ
cm or less, the number of tin oxide aggregate particles having a diameter of 10 μ
m or more being 2.5 or less per mm2. - View Dependent Claims (2, 3, 4, 7, 8, 9, 10, 11, 12)
- m or less, and a bulk resistance of 30 mΩ
- 5. A method of producing a composite oxide sintered body comprising producing a shaped body using an indium oxide powder having a specific surface area of 4 to 14 m2/g, a tin oxide powder having a specific surface area of 4 to 14 m2/g, and a zinc oxide powder having a specific surface area of 2 to 13 m2/g, and sintering the shaped body at 1200 to 1550°
Specification