Toroidal Plasma Channel with Varying Cross-Section Areas Along the Channel

• US 20130118589A1
• Filed: 11/08/2012
• Published: 05/16/2013
• Est. Priority Date: 11/15/2011
• Status: Abandoned Application

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Hu, Chaolin, Chen, Xing
• Application Number:
  US13/672,156
• Publication Number:
  US 20130118589A1
• Time in Patent Office: Days
• US Class Current: 137/1
• CPC Class Codes: C23C 16/45587 Mechanical means for changing the gas flow
• CPC Class Codes: C23C 16/45591 Fixed means, e.g. wings, baffles
• CPC Class Codes: C23C 16/50 using electric discharges generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34
• CPC Class Codes: F17D 1/04 for distribution of gas
• CPC Class Codes: G21B 1/17 Vacuum chambers; Vacuum systems
• CPC Class Codes: H01J 2237/006 Details of gas supplies, e.g. in an ion source, to a beam line, to a specimen or to a workpiece, H01J37/3244 takes precedence; environmental cells for electron microscopes H01J2237/2003; microscopes with environmental specimen chamber H01J2237/2608
• CPC Class Codes: H01J 37/32009 Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources plasma generation in general H05H1/24
• CPC Class Codes: H01J 37/321 the radio frequency energy being inductively coupled to the plasma
• CPC Class Codes: H01J 37/32357 Generation remote from the workpiece, e.g. down-stream
• CPC Class Codes: H01J 37/32449 Gas control, e.g. control of the gas flow
• CPC Class Codes: H01J 37/32513 Sealing means, e.g. sealing between different parts of the vessel
• CPC Class Codes: H01J 37/32807 Construction (includes replacing parts of the apparatus)
• CPC Class Codes: H05H 1/12 wherein the containment vessel forms a closed or nearly closed loop G21B1/05 takes precedence
• CPC Class Codes: Y02E 30/10 Nuclear fusion reactors
• CPC Class Codes: Y10T 137/0318 Processes
• CPC Class Codes: Y10T 137/8376 Combined

Abstract

An assembly for adjusting gas flow patterns and gas-plasma interactions including a toroidal plasma chamber. The toroidal plasma chamber has an injection member, an output member, a first side member and a second side member that are all connected. The first side member has a first inner cross-sectional area in at least a portion of the first side member and a second inner cross-sectional area in at least another portion of the first side member, where the first inner cross-sectional area and the second inner-cross-sectional area being different. The second side member has a third inner cross-sectional area in at least a portion of the second side member and a fourth inner cross-sectional area in at least another portion of the second side member, where the third inner cross-sectional area and the fourth inner-cross-sectional area being different.

Claims

1. An assembly for adjusting gas flow patterns and gas-plasma interactions, the assembly comprising:

a toroidal plasma chamber, wherein the toroidal plasma chamber comprises an injection member, an output member, a first side member and a second side member, the first and second side members connecting the injection member and output member, wherein;

the first side member has a first inner cross-sectional area in at least a portion of the first side member and a second inner cross-sectional area in at least another portion of the first side member, the first inner cross-sectional area and the second inner-cross-sectional area being different, and

the second side member has a third inner cross-sectional area in at least a portion of the second side member and a fourth inner cross-sectional area in at least another portion of the second side member, the third inner cross-sectional area and the fourth inner-cross-sectional area being different; and

a gas injector for injecting gas into the toroidal plasma chamber through the injection member, the injection of gas causing a flow of gas for the formation of plasma within the toroidal plasma chamber.

2. The assembly of claim 1, wherein the first inner cross-sectional area and the third inner cross-sectional area are the same.

3. The assembly of claim 1, wherein the first side member and the second side member have a complementary shape.

4. The assembly of claim 3, wherein the first side member and the second side member are parallel.

5. The assembly of claim 1, wherein an inner cross-sectional area along the first side member and an inner cross-sectional area along the second side member are connected in a smooth contour for continuous fluid flow.

6. The assembly of claim 1, wherein first inner cross-sectional area and the third inner cross-sectional area are in the range of 2 to 50 cm².

7. The assembly of claim 1, wherein the second inner cross-sectional area and the fourth inner cross-sectional area are in the range of 3 to 80 cm².

8. The assembly of claim 1, wherein the first inner cross-sectional area and the third inner cross-sectional area are downstream of the second inner cross-sectional area and the fourth inner cross-sectional area, respectively, along the toroidal plasma chamber.

9. The assembly of claim 1, wherein both the first side member and the second side member are connected to the injection member and the output member with connectors that create a vacuum seal to prevent leakage of gas and plasma and an electric break.

10. The assembly of claim 9, wherein the connectors are fluid cooled.

11. The assembly of claim 1, wherein the first side member and the second side member are removable.

12. An assembly for adjusting gas flow patterns and gas-plasma interactions, the assembly comprising:

a toroidal plasma chamber, wherein the toroidal plasma chamber comprises an injection member, an output member, a first side member and a second side member, the first and second side members connecting the injection member and output member, wherein;

the first side member has an inner cross-sectional area that is different from the inner cross-sectional area of the second side member; and

a gas injector for injecting gas into the toroidal plasma chamber through the injection member, the injection of gas causing a flow of gas for the formation of plasma within the toroidal plasma chamber.

13. A kit for constructing a toroidal plasma chamber, the kit comprising:

an injection member capable of receiving and delivering a gas;

an output member capable of allowing disassociated gas to flow out of the toroidal plasma chamber;

a first side member capable of allowing gas and plasma to flow through, the first side member having a first inner cross-sectional area in at least a first portion, the first inner cross-sectional area smaller than an inner cross-sectional area of a connecting portion of either the injection member or the output member;

a second side member capable of allowing gas and plasma to flow through, the second side member having a second inner cross-sectional area in at least a second portion, the second inner cross-sectional area smaller than an inner cross-sectional area of a connecting portion of either the injection member or the output member; and

water cooled connectors, the water cooled connectors creating a vacuum seal to prevent leakage of gas and plasma, and an electric break.

14. The kit of claim 13, wherein the first side member and the second side member are removable.

15. A method for adjusting gas flow patterns and gas-plasma interactions, the method comprising:

inserting a first side member into a toroidal plasma chamber having a first inner cross-sectional area based on a first predetermined size of a plasma;

inserting a second side member into a toroidal plasma chamber having a second inner cross-sectional area based on a second predetermined size of a plasma;

injecting a gas into the toroidal plasma chamber through an injection member;

causing a flow of gas within the toroidal plasma chamber; and

generating plasma within the toroidal plasma chamber such that plasma flows through an opening of the first side member and through an opening of the second side member.

16. The method of claim 15, wherein the first and the second predetermined plasma size substantially matches the size of plasma that is flowing through the toroidal plasma chamber.

17. A method for replacing a side member of a toroidal plasma chamber, the method comprising:

removing a first connector connecting a first side member and an injection member;

removing a second connector connecting the first side member and an output member;

removing the first side member from the toroidal plasma chamber;

installing a second side member into the toroidal plasma chamber, the second side member being a replacement of the first side member;

installing the first connector to connect the second side member and the injection member; and

installing the second connector to connect the second side member and the output member.