MEMS DEVICE AND MANUFACTURING METHOD THEREOF
First Claim
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1. An MEMS apparatus including an MEMS device comprising:
- a main body containing a fixed electrode; and
a movable electrode movably connected with the main body through a fixer and movable relative to the fixed electrode;
wherein the main body defines a trench therein, the movable electrode being suspended in the trench, a first dielectric layer being located on the main body and above the trench and covering the trench for forming a sealed cavity, the movable electrode being suspended inside the sealed cavity through the fixer, holes being defined through the first dielectric layer and filled with a second dielectric layer.
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Abstract
A Micro-Electro-Mechanical System (MEMS) device and its manufacturing method are provided. Said device comprises a MEMS component and said component comprises a main body (10) and a movable electrode (20). Said main body (10) contains a fixed electrode (110) and a cavity (30) and is covered by a first dielectric layer (400) which seals said cavity (30) into an enclosure. Said movable electrode (20) is connected with said main body (10) flexibly by a fixing piece and overhangs in said enclosure. Vias (405) are formed in said first dielectric layer (400) and filled with a second dielectric layer (500). The patent enables effective packaging for a MEMS device.
5 Citations
14 Claims
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1. An MEMS apparatus including an MEMS device comprising:
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a main body containing a fixed electrode; and a movable electrode movably connected with the main body through a fixer and movable relative to the fixed electrode; wherein the main body defines a trench therein, the movable electrode being suspended in the trench, a first dielectric layer being located on the main body and above the trench and covering the trench for forming a sealed cavity, the movable electrode being suspended inside the sealed cavity through the fixer, holes being defined through the first dielectric layer and filled with a second dielectric layer. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A manufacturing method of an MEMS apparatus comprising:
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providing an MEMS device including a main body and a movable electrode, wherein the main body defines a trench therein, a first sacrificial layer is located on the bottom of the trench, the movable electrode is located on the first sacrificial layer and movably connected with the main body through a fixer; forming a second sacrificial layer in the trench, the second sacrificial layer covering the movable electrode; forming a first dielectric layer on the second sacrificial layer and on the main body, wherein holes are defined through the first dielectric layer for corresponding with location of the second sacrificial layer; removing the first sacrificial layer and the second sacrificial layer through the holes; and forming a second dielectric layer which fills the holes. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14)
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Specification