FABRICATING PARTS FROM PHOTOPOLYMER RESIN
First Claim
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1. A method performed by a data processing apparatus for controlling a projection lithography system, the method comprising:
- accessing, by a data processing apparatus, target geometry data defining a target geometry of an apparatus to be generated from a photopolymer resin by the projection lithography system;
setting adjusted target geometry data equal to the target geometry data, the output model defining an output geometry of an apparatus to be generated from a photopolymer resin by the projection lithography system;
iteratively determining a first deviation measurement based on a simulated cured geometry and the adjusted target geometry data until the first deviation measurement is at or less than a threshold, wherein each iteration comprises;
determining, by the data processing apparatus, first image data defining at least one image that is used to control irradiation of the photopolymer resin in a resin chamber, the first image data being based on the adjusted target geometry data;
determining, by the data processing apparatus, the simulated cured geometry based on an oxygen inhibition model of the photopolymer resin and the first image data;
determining the first deviation measurement based on the simulated cured geometry and the target geometry;
comparing the first deviation measurement to a convergence threshold; and
adjusting the adjusted target geometry data by an adjustment factor when the first deviation measurement is greater than the convergence threshold; and
providing the first image data to a projection lithography system when the first deviation measurement is less than or equal to the convergence threshold.
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Abstract
Methods, systems, and apparatus, including computer programs encoded on a computer storage medium, for fabricating parts from photopolymer resin. In one aspect, a method includes iteratively determining a deviation measurement based on a simulated cured geometry and adjusted target geometry data until the deviation measurement is at or less than a threshold. The simulated cured geometry is determined, based in part, on an inhibition model.
27 Citations
22 Claims
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1. A method performed by a data processing apparatus for controlling a projection lithography system, the method comprising:
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accessing, by a data processing apparatus, target geometry data defining a target geometry of an apparatus to be generated from a photopolymer resin by the projection lithography system; setting adjusted target geometry data equal to the target geometry data, the output model defining an output geometry of an apparatus to be generated from a photopolymer resin by the projection lithography system; iteratively determining a first deviation measurement based on a simulated cured geometry and the adjusted target geometry data until the first deviation measurement is at or less than a threshold, wherein each iteration comprises; determining, by the data processing apparatus, first image data defining at least one image that is used to control irradiation of the photopolymer resin in a resin chamber, the first image data being based on the adjusted target geometry data; determining, by the data processing apparatus, the simulated cured geometry based on an oxygen inhibition model of the photopolymer resin and the first image data; determining the first deviation measurement based on the simulated cured geometry and the target geometry; comparing the first deviation measurement to a convergence threshold; and adjusting the adjusted target geometry data by an adjustment factor when the first deviation measurement is greater than the convergence threshold; and providing the first image data to a projection lithography system when the first deviation measurement is less than or equal to the convergence threshold. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A system comprising:
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a projection lithography apparatus that receives image data and irradiates a photopolymer resin according to the image data; and a data processing apparatus storing instructions in an electronic memory device and executable by the data processing apparatus, and the data processing apparatus, upon such execution, performs operations comprising; accessing target geometry data defining a target geometry of an apparatus to be generated from a photopolymer resin by the projection lithography system; setting adjusted target geometry data equal to the target geometry data, the output model defining an output geometry of an apparatus to be generated from the photopolymer resin by the projection lithography apparatus; iteratively determining a first deviation measurement based on a simulated cured geometry and the adjusted target geometry data until the first deviation measurement is at or less than a threshold, wherein each iteration comprises; determining first image data defining at least one image that is used to control irradiation of the photopolymer resin in a resin chamber, the first image data being based on the adjusted target geometry data; determining the simulated cured geometry based on an oxygen inhibition model of the photopolymer resin and the first image data; determining the first deviation measurement based on the simulated cured geometry and the target geometry; comparing the first deviation measurement to a convergence threshold; and adjusting the adjusted target geometry data by an adjustment factor when the first deviation measurement is greater than the convergence threshold; and providing the first image data to the projection lithography system as the image data when the first deviation measurement is less than or equal to the convergence threshold. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A computer readable storage device storing instructions executable by a data processing apparatus that upon such execution cause the data processing apparatus to perform operations comprising:
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accessing target geometry data defining a target geometry of an apparatus to be generated from a photopolymer resin by the projection lithography system; setting adjusted target geometry data equal to the target geometry data, the output model defining an output geometry of an apparatus to be generated from a photopolymer resin by the projection lithograph system; iteratively determining a first deviation measurement based on a simulated cured geometry and the adjusted target geometry data until the first deviation measurement is at or less than a threshold, wherein each iteration comprises; determining first image data defining at least one image that is used to control irradiation of the photopolymer resin in a resin chamber, the first image data being based on the adjusted target geometry data; determining the simulated cured geometry based on an oxygen inhibition model of the photopolymer resin and the first image data; determining the first deviation measurement based on the simulated cured geometry and the target geometry; comparing the first deviation measurement to a convergence threshold; and adjusting the adjusted target geometry data by an adjustment factor when the first deviation measurement is greater than the convergence threshold; and providing the first image data to a projection lithography system when the first deviation measurement is less than or equal to the convergence threshold.
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Specification