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FABRICATING PARTS FROM PHOTOPOLYMER RESIN

  • US 20130123988A1
  • Filed: 07/15/2011
  • Published: 05/16/2013
  • Est. Priority Date: 07/16/2010
  • Status: Active Grant
First Claim
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1. A method performed by a data processing apparatus for controlling a projection lithography system, the method comprising:

  • accessing, by a data processing apparatus, target geometry data defining a target geometry of an apparatus to be generated from a photopolymer resin by the projection lithography system;

    setting adjusted target geometry data equal to the target geometry data, the output model defining an output geometry of an apparatus to be generated from a photopolymer resin by the projection lithography system;

    iteratively determining a first deviation measurement based on a simulated cured geometry and the adjusted target geometry data until the first deviation measurement is at or less than a threshold, wherein each iteration comprises;

    determining, by the data processing apparatus, first image data defining at least one image that is used to control irradiation of the photopolymer resin in a resin chamber, the first image data being based on the adjusted target geometry data;

    determining, by the data processing apparatus, the simulated cured geometry based on an oxygen inhibition model of the photopolymer resin and the first image data;

    determining the first deviation measurement based on the simulated cured geometry and the target geometry;

    comparing the first deviation measurement to a convergence threshold; and

    adjusting the adjusted target geometry data by an adjustment factor when the first deviation measurement is greater than the convergence threshold; and

    providing the first image data to a projection lithography system when the first deviation measurement is less than or equal to the convergence threshold.

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