Method And Apparatus Of Tuning A Scanning Probe Microscope
First Claim
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1. A method of operating a scanning probe microscope (SPM) comprising:
- tuning the SPM to determine an operating frequency of a drive of the SPM without detecting an amplitude response of an oscillating probe over a range of frequencies.
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Abstract
An apparatus and method of automatically determining an operating frequency of a scanning probe microscope such as an atomic force microscope (AFM) is shown. The operating frequency is not selected based on a peak of the amplitude response of the probe when swept over a range of frequencies; rather, the operating frequency is selected using only peak data corresponding to a TIDPS curve.
12 Citations
20 Claims
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1. A method of operating a scanning probe microscope (SPM) comprising:
tuning the SPM to determine an operating frequency of a drive of the SPM without detecting an amplitude response of an oscillating probe over a range of frequencies. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A scanning probe microscope (SPM) comprising:
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a probe that deflects in response to thermal energy; a detector that detects the deflection; a fast thermal spectrum module coupled to the detector to generate a TIDPS curve; and wherein an operating frequency of the SPM is determined based only on the TIDPS curve. - View Dependent Claims (17, 18, 19, 20)
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Specification