INERTIAL SENSOR
First Claim
1. An inertial sensor, comprising:
- a membrane;
a plurality of first electrodes patterned on the membrane;
a plurality of piezoelectric elements patterned on the first electrodes; and
a second electrode integrally formed to cover the piezoelectric elements.
1 Assignment
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Accused Products
Abstract
Disclosed herein is an inertial sensor. An inertial sensor according to preferred embodiments of the present invention is configured to include a membrane, a plurality of first electrodes patterned on the membrane, a plurality of piezoelectric elements patterned on the first electrodes, and a second electrode integrally formed to cover the piezoelectric elements. By the configuration, the piezoelectric element is encapsulated with the second electrode that is integrally formed to prevent water or humidity from being permeated into the piezoelectric element, thereby preventing physical properties of the piezoelectric element from being changed or preventing the piezoelectric element from being delaminated.
21 Citations
16 Claims
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1. An inertial sensor, comprising:
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a membrane; a plurality of first electrodes patterned on the membrane; a plurality of piezoelectric elements patterned on the first electrodes; and a second electrode integrally formed to cover the piezoelectric elements. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An inertial sensor, comprising:
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a membrane; a plurality of first electrodes patterned on the membrane; a piezoelectric element integrally formed on the first electrodes; and a second electrode integrally formed to cover the piezoelectric element. - View Dependent Claims (12, 13, 14, 15, 16)
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Specification