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SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

  • US 20130126959A1
  • Filed: 09/13/2012
  • Published: 05/23/2013
  • Est. Priority Date: 11/22/2011
  • Status: Abandoned Application
First Claim
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1. A semiconductor device comprising:

  • a first shaped pattern in which a plurality of first holes are arranged and of which a width is periodically changed along an arrangement direction of the first holes;

    a second shaped pattern in which a plurality of second holes are arranged and of which a width is periodically changed along an arrangement direction of the second holes; and

    a slit which is formed along the arrangement direction of the first holes and separates the first shaped pattern and the second shaped pattern.

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