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CONTROL DEVICE FOR A MICROMIRROR, METHOD FOR CONTROLLING A MICROMIRROR AND IMAGE PROJECTION SYSTEM

  • US 20130127800A1
  • Filed: 08/03/2012
  • Published: 05/23/2013
  • Est. Priority Date: 08/16/2011
  • Status: Active Grant
First Claim
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1. A method for controlling a micro-mirror, the method comprising:

  • generating a first control signal which encodes a tilting motion of the micro-mirror about a first tilt axis, at a first frequency;

    generating a second control signal which encodes a tilting motion of the micro-mirror about a second tilt axis which is perpendicular to the first tilt axis, at a second frequency which is lower than the first frequency;

    modulating the second control signal by binary modulation of the second control signal, at the first frequency; and

    controlling force coupling elements of the micro-mirror, using the modulated second control signal and the first control signal.

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