X-RAY DIFFRACTION METHOD AND PORTABLE X-RAY DIFFRACTION APPARATUS USING SAME

• US 20130129051A1
• Filed: 07/28/2011
• Published: 05/23/2013
• Est. Priority Date: 07/28/2010
• Status: Active Grant

• Current Assignee: Rigaku Corporation
• Original Assignee: Rigaku Corporation
• Inventors: Nakano, Asao, Ueji, Yoshinori
• Granted Patent: US 9,518,940 B2
• Time in Patent Office: Days
• US Class Current: 378/71
• CPC Class Codes: G01N 2223/056 diffraction
• CPC Class Codes: G01N 2223/301 portable apparatus
• CPC Class Codes: G01N 2223/33 scanning, i.e. relative motion for measurement of successive object-parts
• CPC Class Codes: G01N 23/20 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
• CPC Class Codes: G01N 23/20008 Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor monochromators for X- rays using crystals G21K1/06
• CPC Class Codes: G01N 23/207 Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions

Abstract

A portable X-ray diffraction apparatus is provided which can be held by a person and on which an image of a spot to be measured can be viewed. The portable X-ray diffraction apparatus includes: X-ray irradiation means that irradiates a sample with collimated X-rays; diffracted X-ray detection means that detects a collimated portion of diffracted X-rays among X-rays diffracted from the sample by the irradiation of the X-rays with the X-ray irradiation means; and signal processing means that processes a signal outputted from the diffracted X-ray detection means. An X-ray diffraction method is used which includes: irradiating a sample with collimated continuous-wavelength X-rays; extracting a collimated portion of diffracted X-rays diffracted from the sample irradiated with the X-rays and condensing the extracted collimated portion of the diffracted X-rays; detecting, using an energy dispersive detection element, the condensed diffracted X-rays; and processing a signal detected by the detection element.

Claims

1. A portable X-ray diffraction apparatus comprising:

X-ray irradiation means that irradiates a sample with collimated X-rays;

diffracted X-ray detection means that detects a collimated portion of diffracted X-rays among X-rays diffracted from the sample by the irradiation of the X-rays with the X-ray irradiation means; and

signal processing means that processes a signal outputted from the diffracted X-ray detection means.

2. The portable X-ray diffraction apparatus according to claim 1, further comprising imaging means that images a spot on the sample to be irradiated with the X-rays and display means that displays an image imaged by the imaging means.

3. The portable X-ray diffraction apparatus according to claim 1, wherein the X-ray irradiation means includes:

an X-ray tube for generating continuous wavelength X-rays;

shutter means that opens and closes an optical path for X-rays generated by the X-ray tube;

irradiation optical means that collimates X-rays generated by the X-ray tube and obliquely irradiating a sample with the collimated X-rays; and

an X-ray irradiation section housing cylinder internally provided with the X-ray tube, the shutter means, and the irradiation optical means.

4. The portable X-ray diffraction apparatus according to claim 3, wherein the irradiation optical means is formed of a slit or a polycapillary.

5. The portable X-ray diffraction apparatus according to claim 1, wherein the diffracted X-ray detection means includes:

a light receiving optical element which inputs a collimated portion of diffracted X-rays among X-rays diffracted from the sample by the irradiation of the X-rays with the X-ray irradiation means and condenses the collimated portion of the input X-rays;

a detection optical element for detecting the diffracted X-rays condensed by the light receiving optical element; and

an X-ray detection section housing internally provided with the light receiving optical element and the detection optical element.

6. The portable X-ray diffraction apparatus according to claim 5, wherein the light receiving optical element includes a polycapillary, the polycapillary having a parallel shaped portion on an incident side thereof to which diffracted X-rays from the sample are incident and a portion on an output side thereof which is smaller in section than the parallel shaped portion on the incident side and from which the diffracted X-rays are outputted.

7. The portable X-ray diffraction apparatus according to claim 5, wherein the detection optical element includes an energy dispersive detector.

8. The portable X-ray diffraction apparatus according to claim 7, wherein the energy dispersive detector is a silicon drift type semiconductor detector (SDD).

9. An X-ray diffraction method, comprising:

irradiating a sample with collimated continuous-wavelength X-rays;

selecting a collimated portion of diffracted X-rays diffracted from the sample irradiated with the collimated continuous-wavelength X-rays and condensing the selected collimated portion of the diffracted X-rays;

detecting, using an energy dispersive detection element, the condensed diffracted X-rays; and

processing a signal detected by the detection element.

10. The X-ray diffraction method according to claim 9, wherein the collimated continuous-wavelength X-rays are formed using a slit or a polycapillary.

11. The X-ray diffraction method according to claim 9, wherein selecting and condensing a collimated portion of diffracted X-rays from the sample is performed by inputting the X-rays diffracted from the sample to an input side of a polycapillary and outputting a collimated portion of the diffracted X-rays from an output side of the polycapillary, the output side of the polycapillary being smaller in diameter than the input side of the polycapillary.

12. An X-ray diffraction method, comprising:

imaging a spot on a sample to be irradiated with X-rays;

displaying an image thus imaged of the spot on the sample to be irradiated with X-rays;

generating continuous wavelength X-rays using an X-ray tube;

collimating the X-rays generated by the X-ray tube and obliquely irradiating the spot on a sample to be irradiated with the collimated X-rays, an image thereof is displayed;

selecting and condensing a collimated portion of X-rays diffracted from the sample irradiated with the X-rays;

detecting the selected and condensed diffracted X-rays using a detection element; and

processing a signal detected by the detection element.

13. The X-ray diffraction method according to claim 12, wherein the X-rays generated by the X-ray tube are collimated using a slit or a polycapillary.

14. The X-ray diffraction method according to claim 12, wherein selecting and condensing a collimated portion of X-rays diffracted from the sample is performed by inputting the X-rays diffracted from the sample to an input side of a polycapillary and outputting a collimated portion of the diffracted X-rays from an output side of the polycapillary, the output side of the polycapillary being smaller in diameter than the input side of the polycapillary.

15. The X-ray diffraction method according to claim 12, wherein the selected and condensed diffracted X-rays are detected by an energy dispersive detection element.