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Method and System for Realizing a Vacuum in a Vacuum Chamber

  • US 20130133752A1
  • Filed: 01/02/2013
  • Published: 05/30/2013
  • Est. Priority Date: 02/22/2009
  • Status: Active Grant
First Claim
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1. A method for realizing a vacuum in at least one vacuum chamber, wherein the method comprises:

  • providing an arrangement comprising a plurality of vacuum chambers, wherein each vacuum chamber is connected to a shared vacuum system comprising;

    a plurality of turbo molecular pumps, each turbo molecular pump being separately connected to a corresponding vacuum chamber;

    at least one common fore pump, anda piping system comprising one or more pipes for connecting the at least one common fore pump to each of the plurality of turbo molecular pumps, the piping system further comprising flow regulators for controlling a flow within the piping system;

    selecting at least one vacuum chamber for pump-down; and

    separately pumping down the at least one selected vacuum chamber by means of the shared vacuum system.

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